Applications des MEMS à la métrologie électrique

Translated title of the contribution: Microelectromechanical components in electrical metrology

Antti Manninen, Anu Kärkkäinen, Nadine Pesonen, A. Oja, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific

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    Physics

    Engineering