Applications des MEMS à la métrologie électrique

Keyphrases

• Micro-electro-mechanical Systems 100%
• Electrical Metrology 100%
• Micromechanics 100%
• Dielectric Layer 50%
• Metrology 50%
• Cost Reduction 50%
• System Components 50%
• Electric 50%
• Mass Production 50%
• Good Stability 50%
• Low Power Consumption 50%
• Consumption Costs 50%
• Electrostatic Field Effect 50%

INIS

• stability 100%
• microelectromechanical systems 100%
• metrology 100%
• layers 50%
• surfaces 50%
• production 50%
• interfaces 50%
• cost 50%
• noise 50%
• precision 50%
• dielectrics 50%
• electrostatics 50%

Engineering

• Microelectromechanical System 100%
• Dielectric Layer 50%
• System Component 50%
• Electric Field 50%
• Mass Production 50%