Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

Tuomas Pensala, Markku Ylilammi, Meltaus Johanna, Kimmo Kokkonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)

Abstract

Size dependence of resonator performance is studied in AlN and ZnO resonators with FEM simulation, electrical measurements, and laser interferometry. Eigenmode spectrum compression due to increased size of the resonator leads to smoothening of the electrical response and flattening of the vibrational at-resonance response as several modes can be simultaneously excited near the device resonance frequency. This is seen both in simulations and in measurements.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE Ultrasonics Symposium, IUS 2007
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages1661-1664
ISBN (Print)978-1-4244-1383-6, 978-1-4244-1384-3
DOIs
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium, IUS 2007 - New York, NY, United States
Duration: 28 Oct 200731 Oct 2007

Conference

ConferenceIEEE Ultrasonics Symposium, IUS 2007
Abbreviated titleIUS 2007
CountryUnited States
CityNew York, NY
Period28/10/0731/10/07

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Keywords

  • thin film
  • BAW
  • AlN
  • ZnO
  • plate wave dispersion
  • coupling coefficient
  • area

Cite this

Pensala, T., Ylilammi, M., Johanna, M., & Kokkonen, K. (2007). Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators. In Proceedings : IEEE Ultrasonics Symposium, IUS 2007 (pp. 1661-1664). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ULTSYM.2007.418