Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

Tuomas Pensala, Markku Ylilammi, Meltaus Johanna, Kimmo Kokkonen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    4 Citations (Scopus)

    Abstract

    Size dependence of resonator performance is studied in AlN and ZnO resonators with FEM simulation, electrical measurements, and laser interferometry. Eigenmode spectrum compression due to increased size of the resonator leads to smoothening of the electrical response and flattening of the vibrational at-resonance response as several modes can be simultaneously excited near the device resonance frequency. This is seen both in simulations and in measurements.
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationIEEE Ultrasonics Symposium, IUS 2007
    Place of PublicationPiscataway, NJ, USA
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1661-1664
    ISBN (Print)978-1-4244-1383-6, 978-1-4244-1384-3
    DOIs
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication
    EventIEEE Ultrasonics Symposium, IUS 2007 - New York, NY, United States
    Duration: 28 Oct 200731 Oct 2007

    Conference

    ConferenceIEEE Ultrasonics Symposium, IUS 2007
    Abbreviated titleIUS 2007
    Country/TerritoryUnited States
    CityNew York, NY
    Period28/10/0731/10/07

    Keywords

    • thin film
    • BAW
    • AlN
    • ZnO
    • plate wave dispersion
    • coupling coefficient
    • area

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