Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

Tuomas Pensala; Markku Ylilammi; Meltaus Johanna; Kimmo Kokkonen

doi:10.1109/ULTSYM.2007.418

Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

Tuomas Pensala, Markku Ylilammi, Meltaus Johanna, Kimmo Kokkonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

6 Citations (Scopus)

Abstract

Size dependence of resonator performance is studied in AlN and ZnO resonators with FEM simulation, electrical measurements, and laser interferometry. Eigenmode spectrum compression due to increased size of the resonator leads to smoothening of the electrical response and flattening of the vibrational at-resonance response as several modes can be simultaneously excited near the device resonance frequency. This is seen both in simulations and in measurements.

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	IEEE Ultrasonics Symposium, IUS 2007
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1661-1664
ISBN (Print)	978-1-4244-1383-6, 978-1-4244-1384-3
DOIs	https://doi.org/10.1109/ULTSYM.2007.418
Publication status	Published - 2007
MoE publication type	A4 Article in a conference publication
Event	IEEE Ultrasonics Symposium, IUS 2007 - New York, NY, United States Duration: 28 Oct 2007 → 31 Oct 2007

Conference

Conference	IEEE Ultrasonics Symposium, IUS 2007
Abbreviated title	IUS 2007
Country/Territory	United States
City	New York, NY
Period	28/10/07 → 31/10/07

Keywords

thin film
BAW
AlN
ZnO
plate wave dispersion
coupling coefficient
area

Access to Document

10.1109/ULTSYM.2007.418

Cite this

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title = "Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators",

abstract = "Size dependence of resonator performance is studied in AlN and ZnO resonators with FEM simulation, electrical measurements, and laser interferometry. Eigenmode spectrum compression due to increased size of the resonator leads to smoothening of the electrical response and flattening of the vibrational at-resonance response as several modes can be simultaneously excited near the device resonance frequency. This is seen both in simulations and in measurements.",

keywords = "thin film, BAW, AlN, ZnO, plate wave dispersion, coupling coefficient, area",

author = "Tuomas Pensala and Markku Ylilammi and Meltaus Johanna and Kimmo Kokkonen",

note = "Project code: 3266; IEEE Ultrasonics Symposium, IUS 2007, IUS 2007 ; Conference date: 28-10-2007 Through 31-10-2007",

year = "2007",

doi = "10.1109/ULTSYM.2007.418",

language = "English",

isbn = "978-1-4244-1383-6",

pages = "1661--1664",

booktitle = "Proceedings",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

}

Pensala, T, Ylilammi, M, Johanna, M & Kokkonen, K 2007, Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators. in Proceedings : IEEE Ultrasonics Symposium, IUS 2007. IEEE Institute of Electrical and Electronic Engineers, Piscataway, NJ, USA, pp. 1661-1664, IEEE Ultrasonics Symposium, IUS 2007, New York, NY, United States, 28/10/07. https://doi.org/10.1109/ULTSYM.2007.418

Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators. / Pensala, Tuomas; Ylilammi, Markku; Johanna, Meltaus et al.
Proceedings : IEEE Ultrasonics Symposium, IUS 2007. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers, 2007. p. 1661-1664.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

AU - Pensala, Tuomas

AU - Ylilammi, Markku

AU - Johanna, Meltaus

AU - Kokkonen, Kimmo

N1 - Project code: 3266

PY - 2007

Y1 - 2007

N2 - Size dependence of resonator performance is studied in AlN and ZnO resonators with FEM simulation, electrical measurements, and laser interferometry. Eigenmode spectrum compression due to increased size of the resonator leads to smoothening of the electrical response and flattening of the vibrational at-resonance response as several modes can be simultaneously excited near the device resonance frequency. This is seen both in simulations and in measurements.

AB - Size dependence of resonator performance is studied in AlN and ZnO resonators with FEM simulation, electrical measurements, and laser interferometry. Eigenmode spectrum compression due to increased size of the resonator leads to smoothening of the electrical response and flattening of the vibrational at-resonance response as several modes can be simultaneously excited near the device resonance frequency. This is seen both in simulations and in measurements.

KW - thin film

KW - BAW

KW - AlN

KW - ZnO

KW - plate wave dispersion

KW - coupling coefficient

KW - area

U2 - 10.1109/ULTSYM.2007.418

DO - 10.1109/ULTSYM.2007.418

M3 - Conference article in proceedings

SN - 978-1-4244-1383-6

SN - 978-1-4244-1384-3

SP - 1661

EP - 1664

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

CY - Piscataway, NJ, USA

T2 - IEEE Ultrasonics Symposium, IUS 2007

Y2 - 28 October 2007 through 31 October 2007

ER -

Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

Abstract

Conference

Keywords

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