Atmospheric pressure chemical vapour synthesis of silicon-carbon nanoceramics from hexamethyldisilane in high temperature aerosol reactor

M. Miettinen (Corresponding Author), M. Johansson, S. Suvanto, J. Riikonen, Unto Tapper, T.T. Pakkanen, V.-P. Lehto, Jorma Jokiniemi, A. Lähde

Research output: Contribution to journalArticleScientificpeer-review

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Abstract

Silicon–carbon nanoceramics have been synthesised from hexamethyldisilane (HMDS) by the atmospheric pressure chemical vapour synthesis (APCVS). Direct aerosol phase synthesis enables continuous production of high purity materials in one-stage process. The particle formation is based on the decomposition of the precursor in a high temperature reactor. Reaction of the gas phase species leads to homogeneous nucleation and formation of the nanoparticles with a narrow size distribution (geometric mean diameter range of particle number size distribution 160–200 nm with 1.5–1.6 geometric standard deviation at reaction temperatures 800–1200 °C). A systematic investigation of the influence of the process temperature on the powder characteristics, including the particle size, crystallinity, chemical structure, surface and bulk composition and surface morphology, was carried out. At the reactor temperature of 800 °C, the synthesised nanoparticles were amorphous preceramics containing mostly SiC4, Si–CH2–Si and Si–H units. The composition of the powder turned towards nanocrystalline 3C–SiC (crystal size under 2 nm) when the reaction temperature was increased to 1200 °C. The reaction temperature appeared to be a key parameter controlling the structure and properties of the synthesised powders.
Original languageEnglish
Pages (from-to)4631-4645
Number of pages15
JournalJournal of Nanoparticle Research
Volume13
Issue number10
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

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Silicon
Aerosol
Aerosols
Reactor
Atmospheric pressure
aerosols
atmospheric pressure
Carbon
Vapors
reactors
Synthesis
vapors
Powder
carbon
Powders
silicon
synthesis
Nanoparticles
Temperature
temperature

Keywords

  • atmospheric pressure chemical vapour synthesis
  • chemical characterisation
  • crystallisation
  • silicon-carbon nanoceramics

Cite this

Miettinen, M. ; Johansson, M. ; Suvanto, S. ; Riikonen, J. ; Tapper, Unto ; Pakkanen, T.T. ; Lehto, V.-P. ; Jokiniemi, Jorma ; Lähde, A. / Atmospheric pressure chemical vapour synthesis of silicon-carbon nanoceramics from hexamethyldisilane in high temperature aerosol reactor. In: Journal of Nanoparticle Research. 2011 ; Vol. 13, No. 10. pp. 4631-4645.
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abstract = "Silicon–carbon nanoceramics have been synthesised from hexamethyldisilane (HMDS) by the atmospheric pressure chemical vapour synthesis (APCVS). Direct aerosol phase synthesis enables continuous production of high purity materials in one-stage process. The particle formation is based on the decomposition of the precursor in a high temperature reactor. Reaction of the gas phase species leads to homogeneous nucleation and formation of the nanoparticles with a narrow size distribution (geometric mean diameter range of particle number size distribution 160–200 nm with 1.5–1.6 geometric standard deviation at reaction temperatures 800–1200 °C). A systematic investigation of the influence of the process temperature on the powder characteristics, including the particle size, crystallinity, chemical structure, surface and bulk composition and surface morphology, was carried out. At the reactor temperature of 800 °C, the synthesised nanoparticles were amorphous preceramics containing mostly SiC4, Si–CH2–Si and Si–H units. The composition of the powder turned towards nanocrystalline 3C–SiC (crystal size under 2 nm) when the reaction temperature was increased to 1200 °C. The reaction temperature appeared to be a key parameter controlling the structure and properties of the synthesised powders.",
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Miettinen, M, Johansson, M, Suvanto, S, Riikonen, J, Tapper, U, Pakkanen, TT, Lehto, V-P, Jokiniemi, J & Lähde, A 2011, 'Atmospheric pressure chemical vapour synthesis of silicon-carbon nanoceramics from hexamethyldisilane in high temperature aerosol reactor', Journal of Nanoparticle Research, vol. 13, no. 10, pp. 4631-4645. https://doi.org/10.1007/s11051-011-0427-7

Atmospheric pressure chemical vapour synthesis of silicon-carbon nanoceramics from hexamethyldisilane in high temperature aerosol reactor. / Miettinen, M. (Corresponding Author); Johansson, M.; Suvanto, S.; Riikonen, J.; Tapper, Unto; Pakkanen, T.T.; Lehto, V.-P.; Jokiniemi, Jorma; Lähde, A.

In: Journal of Nanoparticle Research, Vol. 13, No. 10, 2011, p. 4631-4645.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Atmospheric pressure chemical vapour synthesis of silicon-carbon nanoceramics from hexamethyldisilane in high temperature aerosol reactor

AU - Miettinen, M.

AU - Johansson, M.

AU - Suvanto, S.

AU - Riikonen, J.

AU - Tapper, Unto

AU - Pakkanen, T.T.

AU - Lehto, V.-P.

AU - Jokiniemi, Jorma

AU - Lähde, A.

PY - 2011

Y1 - 2011

N2 - Silicon–carbon nanoceramics have been synthesised from hexamethyldisilane (HMDS) by the atmospheric pressure chemical vapour synthesis (APCVS). Direct aerosol phase synthesis enables continuous production of high purity materials in one-stage process. The particle formation is based on the decomposition of the precursor in a high temperature reactor. Reaction of the gas phase species leads to homogeneous nucleation and formation of the nanoparticles with a narrow size distribution (geometric mean diameter range of particle number size distribution 160–200 nm with 1.5–1.6 geometric standard deviation at reaction temperatures 800–1200 °C). A systematic investigation of the influence of the process temperature on the powder characteristics, including the particle size, crystallinity, chemical structure, surface and bulk composition and surface morphology, was carried out. At the reactor temperature of 800 °C, the synthesised nanoparticles were amorphous preceramics containing mostly SiC4, Si–CH2–Si and Si–H units. The composition of the powder turned towards nanocrystalline 3C–SiC (crystal size under 2 nm) when the reaction temperature was increased to 1200 °C. The reaction temperature appeared to be a key parameter controlling the structure and properties of the synthesised powders.

AB - Silicon–carbon nanoceramics have been synthesised from hexamethyldisilane (HMDS) by the atmospheric pressure chemical vapour synthesis (APCVS). Direct aerosol phase synthesis enables continuous production of high purity materials in one-stage process. The particle formation is based on the decomposition of the precursor in a high temperature reactor. Reaction of the gas phase species leads to homogeneous nucleation and formation of the nanoparticles with a narrow size distribution (geometric mean diameter range of particle number size distribution 160–200 nm with 1.5–1.6 geometric standard deviation at reaction temperatures 800–1200 °C). A systematic investigation of the influence of the process temperature on the powder characteristics, including the particle size, crystallinity, chemical structure, surface and bulk composition and surface morphology, was carried out. At the reactor temperature of 800 °C, the synthesised nanoparticles were amorphous preceramics containing mostly SiC4, Si–CH2–Si and Si–H units. The composition of the powder turned towards nanocrystalline 3C–SiC (crystal size under 2 nm) when the reaction temperature was increased to 1200 °C. The reaction temperature appeared to be a key parameter controlling the structure and properties of the synthesised powders.

KW - atmospheric pressure chemical vapour synthesis

KW - chemical characterisation

KW - crystallisation

KW - silicon-carbon nanoceramics

U2 - 10.1007/s11051-011-0427-7

DO - 10.1007/s11051-011-0427-7

M3 - Article

VL - 13

SP - 4631

EP - 4645

JO - Journal of Nanoparticle Research

JF - Journal of Nanoparticle Research

SN - 1388-0764

IS - 10

ER -