Abstract
Atomic and molecular layer deposition (ALD and MLD,
respectively) techniques are based on repeated cycles of
gas-solid surface reactions. A partial monolayer of atoms
or molecules is deposited to the surface during a single
deposition cycle, enabling tailored film composition in
principle down to molecular resolution on ideal surfaces.
Typically ALD/MLD has been used for applications where
uniform and pinhole free thin film is a necessity even on
3D surfaces. However, thin - even non-uniform - atomic
and molecular deposited layers can also be used to tailor
the surface characteristics of different non-ideal
substrates. For example, print quality of inkjet printing
on polymer films and penetration of water into porous
nonwovens can be adjusted with low-temperature deposited
metal oxide. In addition, adhesion of extrusion coated
biopolymer to inorganic oxides can be improved with a
hybrid layer based on lactic acid.
| Original language | English |
|---|---|
| Pages (from-to) | 7-11 |
| Journal | Journal of Solid State Chemistry |
| Volume | 214 |
| Issue number | June |
| DOIs | |
| Publication status | Published - 2014 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- adhesion
- atomic layer deposition
- hybrid
- inorganic
- surface treatment
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