Atomic and molecular layer deposition for surface modification

Mika Vähä-Nissi (Corresponding Author), Jenni Sievänen, Erkki Salo, Pirjo Heikkilä, Eija Kenttä, Leena-Sisko Johansson, Jorma T. Koskinen, Ali Harlin

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy