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Atomic and molecular layer deposition for surface modification
Mika Vähä-Nissi (Corresponding Author), Jenni Sievänen, Erkki Salo, Pirjo Heikkilä, Eija Kenttä, Leena-Sisko Johansson, Jorma T. Koskinen, Ali Harlin
Research output: Contribution to journal › Article › Scientific › peer-review
17
Citations
(Scopus)