Atomic and molecular layer deposition for surface modification

Mika Vähä-Nissi, Jenni Sievänen, Erkki Salo, Pirjo Heikkilä, L.-S. Johansson, Jorma Koskinen, Ali Harlin

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    Fingerprint

    Dive into the research topics of 'Atomic and molecular layer deposition for surface modification'. Together they form a unique fingerprint.

    Engineering

    Chemistry

    Physics

    Material Science

    Medicine and Dentistry