Abstract
Atomic layer deposition (ALD) is a surface controlled
layer-by-layer process based on self-limiting gas-solid
reactions. Thin films are prepared using volatile
precursors in repeating cycles until a preferred
thickness is obtained. ALD suites for producing dense
and pinhole-free inorganic films uniform in thickness.
The most important commercial application area today is
in microelectronics. The purpose of this paper is to
demonstrate the potential and the challenges of using
ALD for packaging materials. ALD can have a profound
effect on the barrier properties and it can also be used
to create antimicrobial thin films. Due to the brittle
nature of inorganic thin films, these have to be
protected with a polymer layer, also providing heat
sealing properties. Although ALD is today carried out
primarily in batch mode, the ongoing development of
roll-to-roll processes will enhance the techno-economic
feasibility of ALD, among others, for packaging
materials.
Original language | English |
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Pages (from-to) | 575-585 |
Journal | Cellulose chemistry and technology |
Volume | 49 |
Issue number | 7-8 |
Publication status | Published - 2015 |
MoE publication type | A1 Journal article-refereed |
Keywords
- atomic layer deposition
- barrier
- migration
- packaging
- polymer
- safety
- thin film