Atomic layer deposited thin barrier films for packaging

Marja Pitkänen, Mika Vähä-Nissi, Erkki Salo, Jenni Sievänen, Eija Kenttä, Matti Putkonen, Marjaana Rättö, Ali Harlin

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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Physics & Astronomy