Atomic layer deposited thin barrier films for packaging

Mika Vähä-Nissi (Corresponding Author), Marja Pitkänen, Erkki Salo, Jenni Sievänen-Rahijärvi, Matti Putkonen, Ali Harlin

    Research output: Contribution to journalArticleScientificpeer-review

    12 Citations (Scopus)

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    Engineering

    Material Science