Atomic layer deposited titanium dioxide and its application in resonant waveguide grating

T. Alasaarela*, T. Saastamoinen, Jussi Hiltunen, A. Säynätjoki, A. Tervonen, P. Stenberg, M. Kuittinen, S. Honkanen

*Corresponding author for this work

    Research output: Contribution to journalArticleScientificpeer-review

    56 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Atomic layer deposited titanium dioxide and its application in resonant waveguide grating'. Together they form a unique fingerprint.

    Keyphrases

    INIS

    Physics

    Material Science