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Atomic layer deposited titanium dioxide and its application in resonant waveguide grating
T. Alasaarela (Corresponding Author), T. Saastamoinen, Jussi Hiltunen, A. Säynätjoki, A. Tervonen, P. Stenberg, M. Kuittinen, S. Honkanen
Research output: Contribution to journal › Article › Scientific › peer-review
55
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(Scopus)