Atomic layer deposited titanium dioxide and its application in resonant waveguide grating

  • T. Alasaarela*
  • , T. Saastamoinen
  • , Jussi Hiltunen
  • , A. Säynätjoki
  • , A. Tervonen
  • , P. Stenberg
  • , M. Kuittinen
  • , S. Honkanen
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › Scientific › peer-review

    56 Citations (Scopus)

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    Material Science