Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors

J. Härkönen (Corresponding Author), J. Ott, M. Mäkelä, T. Arsenovich, A. Gädda, T. Peltola, E. Tuovinen, P. Luukka, E. Tuominen, A. Junkes, J. Niinistö, M. Ritala

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)

    Fingerprint Dive into the research topics of 'Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Physics & Astronomy