Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors

J. Härkönen (Corresponding Author), J. Ott, M. Mäkelä, T. Arsenovich, A. Gädda, T. Peltola, E. Tuovinen, P. Luukka, E. Tuominen, A. Junkes, J. Niinistö, M. Ritala

    Research output: Contribution to journal › Article › Scientific › peer-review

    9 Citations (Scopus)

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