Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials

Terhi Hirvikorpi, Mika Vähä-Nissi, Ali Harlin, Maarit Karppinen

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 2010
Event	European Conference on NanoFilms, ECNF 2010 - Liege, Belgium Duration: 22 Mar 2010 → 25 Mar 2010

Conference	European Conference on NanoFilms, ECNF 2010
Abbreviated title	ECNF 2010
Country/Territory	Belgium
City	Liege
Period	22/03/10 → 25/03/10

Cite this

@conference{c04616a57463430ba84a6953c9877ec9,

title = "Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials",

author = "Terhi Hirvikorpi and Mika V{\"a}h{\"a}-Nissi and Ali Harlin and Maarit Karppinen",

year = "2010",

language = "English",

note = "European Conference on NanoFilms, ECNF 2010, ECNF 2010 ; Conference date: 22-03-2010 Through 25-03-2010",

}