Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials

Terhi Hirvikorpi, Mika Vähä-Nissi, Ali Harlin, Maarit Karppinen

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2010
EventEuropean Conference on NanoFilms, ECNF 2010 - Liege, Belgium
Duration: 22 Mar 201025 Mar 2010

Conference

ConferenceEuropean Conference on NanoFilms, ECNF 2010
Abbreviated titleECNF 2010
CountryBelgium
CityLiege
Period22/03/1025/03/10

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