Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials

Terhi Hirvikorpi, Mika Vähä-Nissi, Ali Harlin, Maarit Karppinen

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2010
EventEuropean Conference on NanoFilms, ECNF 2010 - Liege, Belgium
Duration: 22 Mar 201025 Mar 2010

Conference

ConferenceEuropean Conference on NanoFilms, ECNF 2010
Abbreviated titleECNF 2010
CountryBelgium
CityLiege
Period22/03/1025/03/10

Cite this

Hirvikorpi, T., Vähä-Nissi, M., Harlin, A., & Karppinen, M. (2010). Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials. Paper presented at European Conference on NanoFilms, ECNF 2010, Liege, Belgium.
Hirvikorpi, Terhi ; Vähä-Nissi, Mika ; Harlin, Ali ; Karppinen, Maarit. / Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials. Paper presented at European Conference on NanoFilms, ECNF 2010, Liege, Belgium.
@conference{c04616a57463430ba84a6953c9877ec9,
title = "Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials",
author = "Terhi Hirvikorpi and Mika V{\"a}h{\"a}-Nissi and Ali Harlin and Maarit Karppinen",
year = "2010",
language = "English",
note = "European Conference on NanoFilms, ECNF 2010, ECNF 2010 ; Conference date: 22-03-2010 Through 25-03-2010",

}

Hirvikorpi, T, Vähä-Nissi, M, Harlin, A & Karppinen, M 2010, 'Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials' Paper presented at European Conference on NanoFilms, ECNF 2010, Liege, Belgium, 22/03/10 - 25/03/10, .

Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials. / Hirvikorpi, Terhi; Vähä-Nissi, Mika; Harlin, Ali; Karppinen, Maarit.

2010. Paper presented at European Conference on NanoFilms, ECNF 2010, Liege, Belgium.

Research output: Contribution to conferenceConference articleScientific

TY - CONF

T1 - Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials

AU - Hirvikorpi, Terhi

AU - Vähä-Nissi, Mika

AU - Harlin, Ali

AU - Karppinen, Maarit

PY - 2010

Y1 - 2010

M3 - Conference article

ER -

Hirvikorpi T, Vähä-Nissi M, Harlin A, Karppinen M. Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials. 2010. Paper presented at European Conference on NanoFilms, ECNF 2010, Liege, Belgium.