Atomic layer deposition as a means to fabricate thin barrier layers on packaging materials

Terhi Hirvikorpi, Mika Vähä-Nissi, Ali Harlin, Maarit Karppinen

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2010
    EventEuropean Conference on NanoFilms, ECNF 2010 - Liege, Belgium
    Duration: 22 Mar 201025 Mar 2010

    Conference

    ConferenceEuropean Conference on NanoFilms, ECNF 2010
    Abbreviated titleECNF 2010
    Country/TerritoryBelgium
    CityLiege
    Period22/03/1025/03/10

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