Atomic layer deposition in MEMS technology

Riikka Puurunen, Hannu Kattelus, Tuomo Suntola

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

18 Citations (Scopus)
Original languageEnglish
Title of host publicationHandbook of Silicon Based MEMS Materials and Technologies
EditorsMarkku Tilli, Mervi Paulasto-Krockel, Teruaki Matooka, Veli-Matti Airaksinen, Sami Franssila, Veikko Lindroos, Ari Lehto
Place of PublicationBoston, USA; Oxford, UK
ISBN (Electronic)978-081-551-988-1, 978-008-094-772-3
ISBN (Print)978-0-815-51594-4
Publication statusPublished - 2010
MoE publication typeA3 Part of a book or another research book

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