Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Matti Putkonen, Pirjo Heikkilä, Antti T. Pasanen, Hille Rautkoski, Laura Svärd, Pekka Simell, Mika Vähä-Nissi, Timo Sajavaara

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Abstract

Here, the authors report on the preparation of core-shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated. According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry, carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based PVA removal. Another approach utilized 200-400 nm thick carbon fibers prepared by electrospinning from polyacrylonitrile and subsequent thermal treatment.

Original languageEnglish
Article number01A102
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume36
Issue number1
DOIs
Publication statusPublished - 1 Jan 2018
MoE publication typeA1 Journal article-refereed

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Atomic layer deposition
atomic layer epitaxy
Catalyst supports
Polyvinyl Alcohol
polyvinyl alcohol
Polyvinyl alcohols
Electrospinning
catalysts
Thin films
fibers
Fibers
Carbon
thin films
ceramics
polyacrylonitrile
Polyacrylonitriles
carbon
Rutherford backscattering spectroscopy
carbon fibers
Spectrometry

Cite this

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abstract = "Here, the authors report on the preparation of core-shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated. According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry, carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based PVA removal. Another approach utilized 200-400 nm thick carbon fibers prepared by electrospinning from polyacrylonitrile and subsequent thermal treatment.",
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T1 - Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

AU - Putkonen, Matti

AU - Heikkilä, Pirjo

AU - Pasanen, Antti T.

AU - Rautkoski, Hille

AU - Svärd, Laura

AU - Simell, Pekka

AU - Vähä-Nissi, Mika

AU - Sajavaara, Timo

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Y1 - 2018/1/1

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AB - Here, the authors report on the preparation of core-shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated. According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry, carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based PVA removal. Another approach utilized 200-400 nm thick carbon fibers prepared by electrospinning from polyacrylonitrile and subsequent thermal treatment.

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