Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Matti Putkonen; Pirjo Heikkilä; Antti T. Pasanen; Hille Rautkoski; Laura Svärd; Pekka Simell; Mika Vähä-Nissi; Timo Sajavaara

doi:10.1116/1.4999826

Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Matti Putkonen, Pirjo Heikkilä, Antti T. Pasanen, Hille Rautkoski, Laura Svärd, Pekka Simell, Mika Vähä-Nissi, Timo Sajavaara

University of Jyväskylä

Research output: Contribution to journal › Article › Scientific › peer-review

5 Citations (Scopus)

Abstract

Here, the authors report on the preparation of core-shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl₄, Nb(OEt)₅, and H₂O as precursors is demonstrated. According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry, carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based PVA removal. Another approach utilized 200-400 nm thick carbon fibers prepared by electrospinning from polyacrylonitrile and subsequent thermal treatment.

Original language	English
Article number	01A102
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	36
Issue number	1
DOIs	https://doi.org/10.1116/1.4999826
Publication status	Published - 1 Jan 2018
MoE publication type	A1 Journal article-refereed

Access to Document

10.1116/1.4999826

Cite this

Putkonen, M., Heikkilä, P., Pasanen, A. T., Rautkoski, H., Svärd, L., Simell, P., Vähä-Nissi, M., & Sajavaara, T. (2018). Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 36(1), Article 01A102. https://doi.org/10.1116/1.4999826

@article{81cc15823e194f729335da40ffccd974,

title = "Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures",

abstract = "Here, the authors report on the preparation of core-shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated. According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry, carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based PVA removal. Another approach utilized 200-400 nm thick carbon fibers prepared by electrospinning from polyacrylonitrile and subsequent thermal treatment.",

author = "Matti Putkonen and Pirjo Heikkil{\"a} and Pasanen, {Antti T.} and Hille Rautkoski and Laura Sv{\"a}rd and Pekka Simell and Mika V{\"a}h{\"a}-Nissi and Timo Sajavaara",

note = "Funding Information: This paper is based on results from the CATAPULT project. CATAPULT (2013–2016) was funded by the European Commission and Fuel Cell and Hydrogen Joint Undertaking (Grant Agreement No. 325268), and by the Finnish Funding Agency for Technology and Innovation TEKES. Funding from the Academy of Finland (Project ID 263 577) is also gratefully acknowledged. Publisher Copyright: {\textcopyright} 2017 Author(s). Copyright: Copyright 2017 Elsevier B.V., All rights reserved.",

year = "2018",

month = jan,

day = "1",

doi = "10.1116/1.4999826",

language = "English",

volume = "36",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "American Vacuum Society (AVS)",

number = "1",

}

Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures. / Putkonen, Matti; Heikkilä, Pirjo ; Pasanen, Antti T. et al.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 36, No. 1, 01A102, 01.01.2018.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

AU - Putkonen, Matti

AU - Heikkilä, Pirjo

AU - Pasanen, Antti T.

AU - Rautkoski, Hille

AU - Svärd, Laura

AU - Simell, Pekka

AU - Vähä-Nissi, Mika

AU - Sajavaara, Timo

N1 - Funding Information: This paper is based on results from the CATAPULT project. CATAPULT (2013–2016) was funded by the European Commission and Fuel Cell and Hydrogen Joint Undertaking (Grant Agreement No. 325268), and by the Finnish Funding Agency for Technology and Innovation TEKES. Funding from the Academy of Finland (Project ID 263 577) is also gratefully acknowledged. Publisher Copyright: © 2017 Author(s). Copyright: Copyright 2017 Elsevier B.V., All rights reserved.

PY - 2018/1/1

Y1 - 2018/1/1

N2 - Here, the authors report on the preparation of core-shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated. According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry, carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based PVA removal. Another approach utilized 200-400 nm thick carbon fibers prepared by electrospinning from polyacrylonitrile and subsequent thermal treatment.

AB - Here, the authors report on the preparation of core-shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated. According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry, carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based PVA removal. Another approach utilized 200-400 nm thick carbon fibers prepared by electrospinning from polyacrylonitrile and subsequent thermal treatment.

UR - http://www.scopus.com/inward/record.url?scp=85032691259&partnerID=8YFLogxK

U2 - 10.1116/1.4999826

DO - 10.1116/1.4999826

M3 - Article

AN - SCOPUS:85032691259

SN - 0734-2101

VL - 36

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 1

M1 - 01A102

ER -

Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Abstract

Access to Document

Other files and links

Fingerprint

Cite this