Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors

Antti J. Niskanen (Corresponding Author), Aapo Varpula, Mikko Utriainen, Gomathi Natarajan, David C. Cameron, Sergey Novikov, Veli-Matti Airaksinen, Juha Sinkkonen, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy