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Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors
Antti J. Niskanen (Corresponding Author), Aapo Varpula, Mikko Utriainen, Gomathi Natarajan, David C. Cameron, Sergey Novikov, Veli-Matti Airaksinen, Juha Sinkkonen, Sami Franssila
Research output: Contribution to journal › Article › Scientific › peer-review
11
Citations
(Scopus)