Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors
- Antti J. Niskanen*
- , Aapo Varpula
- , Mikko Utriainen
- , Gomathi Natarajan
- , David C. Cameron
- , Sergey Novikov
- , Veli-Matti Airaksinen
- , Juha Sinkkonen
- , Sami Franssila
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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