Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors

Antti J. Niskanen (Corresponding Author), Aapo Varpula, Mikko Utriainen, Gomathi Natarajan, David C. Cameron, Sergey Novikov, Veli-Matti Airaksinen, Juha Sinkkonen, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)

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Engineering

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Chemical Engineering