Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes

Kestutis Grigoras, J. Keskinen, Elina Yli-Rantala, S. Laakso, H. Välimäki, P. Kauranen, Jouni Ahopelto, Mika Prunnila

    Research output: Contribution to conferenceConference PosterScientificpeer-review

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    Physics & Astronomy