Atomic layer epitaxy of GaAs in a hydride vapor phase system

Jouni Ahopelto, Hannu Kattelus, Ilkka Suni

Research output: Contribution to conference › Conference Abstract › Scientific

Original language	English
Publication status	Published - 1989
MoE publication type	Not Eligible
Event	9th International Conference on Crystal Growth, ICCG-9 - Sendai, Japan Duration: 20 Aug 1989 → 25 Aug 1989

Conference	9th International Conference on Crystal Growth, ICCG-9
Country/Territory	Japan
City	Sendai
Period	20/08/89 → 25/08/89

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