Atomic layer epitaxy of GaAs in a hydride vapor phase system

Jouni Ahopelto, Hannu Kattelus, Ilkka Suni

    Research output: Contribution to conference › Conference Abstract › Scientific

    Original languageEnglish
    Publication statusPublished - 1989
    MoE publication typeNot Eligible
    Event9th International Conference on Crystal Growth, ICCG-9 - Sendai, Japan
    Duration: 20 Aug 1989 → 25 Aug 1989

    Conference

    Conference9th International Conference on Crystal Growth, ICCG-9
    Country/TerritoryJapan
    CitySendai
    Period20/08/89 → 25/08/89

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