Abstract
The demand for automatic quality inspection of individual micro-components has increased strongly in the micro-optoelectronics industry. In many cases, quality inspection of those micro-components needs dexterous microhandling. However, automatic dexterous handling of microcomponents is a very challenging issue which is barely explored. This paper presents a high-DOF (degrees of freedom) automatic dexterous handling and inspection system for micro-optoelectronic components using a novel 6-DOF piezoelectric microgripper. The control system includes three hierarchical layers: an actuator control layer, a motion planning layer and a mission control layer. Machine vision is applied in automatic manipulation. The performance of the system is demonstrated in a vision-based automatic inspection task for 300 × 300 × 100-μm-sized optoelectronics components and reached a cycle time of 7.1 ± 0.3 s.
Original language | English |
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Pages (from-to) | 359-387 |
Number of pages | 29 |
Journal | Journal of Micromechatronics |
Volume | 3 |
Issue number | 3-4 |
DOIs | |
Publication status | Published - 2006 |
MoE publication type | A1 Journal article-refereed |
Keywords
- Dextrous microhandling
- 6-DOF microgripper
- automatic manipulation
- vision-based inspection