Automatic dextrous microhandling based on a 6-DOF microgripper

Quan Zhou, Petteri Korhonen, Jukka Laitinen, Sami Sjövall

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)

Abstract

The demand for automatic quality inspection of individual micro-components has increased strongly in the micro-optoelectronics industry. In many cases, quality inspection of those micro-components needs dexterous microhandling. However, automatic dexterous handling of microcomponents is a very challenging issue which is barely explored. This paper presents a high-DOF (degrees of freedom) automatic dexterous handling and inspection system for micro-optoelectronic components using a novel 6-DOF piezoelectric microgripper. The control system includes three hierarchical layers: an actuator control layer, a motion planning layer and a mission control layer. Machine vision is applied in automatic manipulation. The performance of the system is demonstrated in a vision-based automatic inspection task for 300 × 300 × 100-μm-sized optoelectronics components and reached a cycle time of 7.1 ± 0.3 s.
Original languageEnglish
Pages (from-to)359-387
Number of pages29
JournalJournal of Micromechatronics
Volume3
Issue number3-4
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Fingerprint

Inspection
Optoelectronic devices
Motion planning
Computer vision
Actuators
Control systems
Industry

Keywords

  • Dextrous microhandling
  • 6-DOF microgripper
  • automatic manipulation
  • vision-based inspection

Cite this

Zhou, Quan ; Korhonen, Petteri ; Laitinen, Jukka ; Sjövall, Sami. / Automatic dextrous microhandling based on a 6-DOF microgripper. In: Journal of Micromechatronics. 2006 ; Vol. 3, No. 3-4. pp. 359-387.
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Automatic dextrous microhandling based on a 6-DOF microgripper. / Zhou, Quan; Korhonen, Petteri; Laitinen, Jukka; Sjövall, Sami.

In: Journal of Micromechatronics, Vol. 3, No. 3-4, 2006, p. 359-387.

Research output: Contribution to journalArticleScientificpeer-review

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AB - The demand for automatic quality inspection of individual micro-components has increased strongly in the micro-optoelectronics industry. In many cases, quality inspection of those micro-components needs dexterous microhandling. However, automatic dexterous handling of microcomponents is a very challenging issue which is barely explored. This paper presents a high-DOF (degrees of freedom) automatic dexterous handling and inspection system for micro-optoelectronic components using a novel 6-DOF piezoelectric microgripper. The control system includes three hierarchical layers: an actuator control layer, a motion planning layer and a mission control layer. Machine vision is applied in automatic manipulation. The performance of the system is demonstrated in a vision-based automatic inspection task for 300 × 300 × 100-μm-sized optoelectronics components and reached a cycle time of 7.1 ± 0.3 s.

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