Backscattering analysis of reactively co-sputtered in situ annealed superconducting Y1Ba2Cu3O7-x thin films

Jaakko Saarilahti; Jorma Salmi; Eero Rauhala

Backscattering analysis of reactively co-sputtered in situ annealed superconducting Y₁Ba₂Cu₃O_7-x thin films

Jaakko Saarilahti, Jorma Salmi, Eero Rauhala

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Ion beam analysis
Subtitle of host publication	proceedings of the Tenth International Conference on Ion Beam Analysis
Editors	H.H. Brongersma, M.J.A. de Voigt
Place of Publication	Eindhoven
Publisher	Elsevier
Number of pages	46
Publication status	Published - 1991
MoE publication type	A4 Article in a conference publication
Event	10th International Conference on Ion Beam Analysis - Eindhoven, Netherlands Duration: 1 Jul 1991 → 5 Jul 1991

Publication series

Series	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	B64
ISSN	0168-583X

Conference

Conference	10th International Conference on Ion Beam Analysis
Country/Territory	Netherlands
City	Eindhoven
Period	1/07/91 → 5/07/91

Cite this

Saarilahti, Jaakko ; Salmi, Jorma ; Rauhala, Eero. / Backscattering analysis of reactively co-sputtered in situ annealed superconducting Y₁Ba₂Cu₃O_7-x thin films. Ion beam analysis: proceedings of the Tenth International Conference on Ion Beam Analysis. editor / H.H. Brongersma ; M.J.A. de Voigt. Eindhoven : Elsevier, 1991. (Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. B64).

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title = "Backscattering analysis of reactively co-sputtered in situ annealed superconducting Y1Ba2Cu3O7-x thin films",

author = "Jaakko Saarilahti and Jorma Salmi and Eero Rauhala",

note = "Project code: PUOT9124; 10th International Conference on Ion Beam Analysis ; Conference date: 01-07-1991 Through 05-07-1991",

year = "1991",

language = "English",

series = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

publisher = "Elsevier",

editor = "H.H. Brongersma and {de Voigt}, M.J.A.",

booktitle = "Ion beam analysis",

address = "Netherlands",

}

Saarilahti, J, Salmi, J & Rauhala, E 1991, Backscattering analysis of reactively co-sputtered in situ annealed superconducting Y₁Ba₂Cu₃O_7-x thin films. in HH Brongersma & MJA de Voigt (eds), Ion beam analysis: proceedings of the Tenth International Conference on Ion Beam Analysis. Elsevier, Eindhoven, Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, vol. B64, 10th International Conference on Ion Beam Analysis, Eindhoven, Netherlands, 1/07/91.

Backscattering analysis of reactively co-sputtered in situ annealed superconducting Y₁Ba₂Cu₃O_7-x thin films. / Saarilahti, Jaakko; Salmi, Jorma; Rauhala, Eero.
Ion beam analysis: proceedings of the Tenth International Conference on Ion Beam Analysis. ed. / H.H. Brongersma; M.J.A. de Voigt. Eindhoven: Elsevier, 1991. (Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. B64).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Backscattering analysis of reactively co-sputtered in situ annealed superconducting Y1Ba2Cu3O7-x thin films

AU - Saarilahti, Jaakko

AU - Salmi, Jorma

AU - Rauhala, Eero

N1 - Project code: PUOT9124

PY - 1991

Y1 - 1991

M3 - Conference article in proceedings

T3 - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

BT - Ion beam analysis

A2 - Brongersma, H.H.

A2 - de Voigt, M.J.A.

PB - Elsevier

CY - Eindhoven

T2 - 10th International Conference on Ion Beam Analysis

Y2 - 1 July 1991 through 5 July 1991

ER -

Saarilahti J, Salmi J, Rauhala E. Backscattering analysis of reactively co-sputtered in situ annealed superconducting Y₁Ba₂Cu₃O_7-x thin films. In Brongersma HH, de Voigt MJA, editors, Ion beam analysis: proceedings of the Tenth International Conference on Ion Beam Analysis. Eindhoven: Elsevier. 1991. (Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. B64).