Barrier properties of plastic films coated with Al                         2                         O                         3                          by roll-to-roll ALD

Terhi Hirvikorpi; Risto Laine; Mika Vähä-Nissi; Väinö Kilpi; Wei Min Li; Sven Lindfors; Jari Vartiainen; Juha Nikkola; Ali Harlin; Juhana Kostamo; Minna Toivola

Barrier properties of plastic films coated with Al ₂ O ₃ by roll-to-roll ALD

Terhi Hirvikorpi, Risto Laine, Mika Vähä-Nissi, Väinö Kilpi, Wei Min Li, Sven Lindfors, Jari Vartiainen, Juha Nikkola, Ali Harlin, Juhana Kostamo, Minna Toivola

Picosun Oy

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014
Editors	Thomas Gessner
Pages	365-372
Number of pages	8
ISBN (Electronic)	978-386359201-1
Publication status	Published - 2014
MoE publication type	A4 Article in a conference publication
Event	Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2014 - Vienna, Austria Duration: 26 Mar 2014 → 27 Mar 2014

Conference

Conference	Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2014
Country/Territory	Austria
City	Vienna
Period	26/03/14 → 27/03/14

Cite this

Hirvikorpi, T., Laine, R., Vähä-Nissi, M., Kilpi, V., Li, W. M., Lindfors, S., Vartiainen, J., Nikkola, J., Harlin, A., Kostamo, J., & Toivola, M. (2014). Barrier properties of plastic films coated with Al ₂ O ₃ by roll-to-roll ALD. In T. Gessner (Ed.), Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014 (pp. 365-372)

Hirvikorpi, Terhi ; Laine, Risto ; Vähä-Nissi, Mika et al. / Barrier properties of plastic films coated with Al ₂ O ₃ by roll-to-roll ALD. Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014. editor / Thomas Gessner. 2014. pp. 365-372

@inproceedings{2cf3a56d33b1454b8ed4e8e36e63d84f,

title = "Barrier properties of plastic films coated with Al 2 O 3 by roll-to-roll ALD",

author = "Terhi Hirvikorpi and Risto Laine and Mika V{\"a}h{\"a}-Nissi and V{\"a}in{\"o} Kilpi and Li, {Wei Min} and Sven Lindfors and Jari Vartiainen and Juha Nikkola and Ali Harlin and Juhana Kostamo and Minna Toivola",

year = "2014",

language = "English",

pages = "365--372",

editor = "Thomas Gessner",

booktitle = "Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014",

note = "Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2014 ; Conference date: 26-03-2014 Through 27-03-2014",

}

Hirvikorpi, T, Laine, R, Vähä-Nissi, M, Kilpi, V, Li, WM, Lindfors, S, Vartiainen, J, Nikkola, J, Harlin, A, Kostamo, J & Toivola, M 2014, Barrier properties of plastic films coated with Al ₂ O ₃ by roll-to-roll ALD. in T Gessner (ed.), Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014. pp. 365-372, Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2014, Vienna, Austria, 26/03/14.

Barrier properties of plastic films coated with Al ₂ O ₃ by roll-to-roll ALD. / Hirvikorpi, Terhi; Laine, Risto; Vähä-Nissi, Mika et al.
Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014. ed. / Thomas Gessner. 2014. p. 365-372.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Barrier properties of plastic films coated with Al 2 O 3 by roll-to-roll ALD

AU - Hirvikorpi, Terhi

AU - Laine, Risto

AU - Vähä-Nissi, Mika

AU - Kilpi, Väinö

AU - Li, Wei Min

AU - Lindfors, Sven

AU - Vartiainen, Jari

AU - Nikkola, Juha

AU - Harlin, Ali

AU - Kostamo, Juhana

AU - Toivola, Minna

PY - 2014

Y1 - 2014

UR - http://www.scopus.com/inward/record.url?scp=85064718935&partnerID=8YFLogxK

M3 - Conference article in proceedings

AN - SCOPUS:85064718935

SP - 365

EP - 372

BT - Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014

A2 - Gessner, Thomas

T2 - Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2014

Y2 - 26 March 2014 through 27 March 2014

ER -

Hirvikorpi T, Laine R, Vähä-Nissi M, Kilpi V, Li WM, Lindfors S et al. Barrier properties of plastic films coated with Al ₂ O ₃ by roll-to-roll ALD. In Gessner T, editor, Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014. 2014. p. 365-372

Barrier properties of plastic films coated with Al 2 O 3 by roll-to-roll ALD

Conference

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Barrier properties of plastic films coated with Al ₂ O ₃ by roll-to-roll ALD