Barrier properties of plastic films coated with Al2O3 by roll-to-roll ALD

W. Li, T. Hirvikorpi, R. Lainer, Mika Vähä-Nissi, Erkki Salo, V. Kilpi, S. Lindfors, Jari Vartiainen, Eija Kenttä, Juha Nikkola, Alli Harlin, J. Kostamo

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2013
    Event13th International Conference on Atomic Layer Deposition, ALD 2013 - San Diego, California, San Diego, United States
    Duration: 28 Jul 201331 Jul 2013
    Conference number: 13

    Conference

    Conference13th International Conference on Atomic Layer Deposition, ALD 2013
    Abbreviated titleALD 2013
    CountryUnited States
    CitySan Diego
    Period28/07/1331/07/13

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