Barrier properties of plastic films coated with Al2O3 by roll-to-roll ALD

W. Li, T. Hirvikorpi, R. Lainer, Mika Vähä-Nissi, Erkki Salo, V. Kilpi, S. Lindfors, Jari Vartiainen, Eija Kenttä, Juha Nikkola, Alli Harlin, J. Kostamo

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 2013
Event13th International Conference on Atomic Layer Deposition, ALD 2013 - San Diego, California, San Diego, United States
Duration: 28 Jul 201331 Jul 2013
Conference number: 13

Conference

Conference13th International Conference on Atomic Layer Deposition, ALD 2013
Abbreviated titleALD 2013
CountryUnited States
CitySan Diego
Period28/07/1331/07/13

Cite this

Li, W., Hirvikorpi, T., Lainer, R., Vähä-Nissi, M., Salo, E., Kilpi, V., Lindfors, S., Vartiainen, J., Kenttä, E., Nikkola, J., Harlin, A., & Kostamo, J. (2013). Barrier properties of plastic films coated with Al2O3 by roll-to-roll ALD. Abstract from 13th International Conference on Atomic Layer Deposition, ALD 2013, San Diego, United States.