Barrier properties of plastic films coated with Al2O3 by roll-to-roll ALD

W. Li; T. Hirvikorpi; R. Lainer; Mika Vähä-Nissi; Erkki Salo; V. Kilpi; S. Lindfors; Jari Vartiainen; Eija Kenttä; Juha Nikkola; Alli Harlin; J. Kostamo

Barrier properties of plastic films coated with Al2O3 by roll-to-roll ALD

W. Li, T. Hirvikorpi, R. Lainer, Mika Vähä-Nissi, Erkki Salo, V. Kilpi, S. Lindfors, Jari Vartiainen, Eija Kenttä, Juha Nikkola, Alli Harlin, J. Kostamo

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2013
Event	13th International Conference on Atomic Layer Deposition, ALD 2013 - San Diego, California, San Diego, United States Duration: 28 Jul 2013 → 31 Jul 2013 Conference number: 13

Conference

Conference	13th International Conference on Atomic Layer Deposition, ALD 2013
Abbreviated title	ALD 2013
Country	United States
City	San Diego
Period	28/07/13 → 31/07/13

Cite this

@conference{9a750f49b37a44169b8133e76f4d76d9,

title = "Barrier properties of plastic films coated with Al2O3 by roll-to-roll ALD",

author = "W. Li and T. Hirvikorpi and R. Lainer and Mika V{\"a}h{\"a}-Nissi and Erkki Salo and V. Kilpi and S. Lindfors and Jari Vartiainen and Eija Kentt{\"a} and Juha Nikkola and Alli Harlin and J. Kostamo",

note = "Only abstract review if not published in JVST. ; 13th International Conference on Atomic Layer Deposition, ALD 2013, ALD 2013 ; Conference date: 28-07-2013 Through 31-07-2013",

year = "2013",

language = "English",

}

Barrier properties of plastic films coated with Al2O3 by roll-to-roll ALD. / Li, W.; Hirvikorpi, T.; Lainer, R.; Vähä-Nissi, Mika; Salo, Erkki; Kilpi, V.; Lindfors, S.; Vartiainen, Jari; Kenttä, Eija; Nikkola, Juha; Harlin, Alli; Kostamo, J.

2013. Abstract from 13th International Conference on Atomic Layer Deposition, ALD 2013, San Diego, United States.

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

TY - CONF

T1 - Barrier properties of plastic films coated with Al2O3 by roll-to-roll ALD

AU - Li, W.

AU - Hirvikorpi, T.

AU - Lainer, R.

AU - Vähä-Nissi, Mika

AU - Salo, Erkki

AU - Kilpi, V.

AU - Lindfors, S.

AU - Vartiainen, Jari

AU - Kenttä, Eija

AU - Nikkola, Juha

AU - Harlin, Alli

AU - Kostamo, J.

N1 - Conference code: 13

PY - 2013

Y1 - 2013

M3 - Conference Abstract

T2 - 13th International Conference on Atomic Layer Deposition, ALD 2013

Y2 - 28 July 2013 through 31 July 2013

ER -