BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator

Jussi Hiltunen; Dilan Seneviratne; Rong Sun; Michael Stolfi; Harry Tuller; Jyrki Lappalainen; Vilho Lantto

doi:10.1063/1.2404982

BaTiO₃-SrTiO₃ multilayer thin film electro-optic waveguide modulator

Jussi Hiltunen, Dilan Seneviratne, Rong Sun, Michael Stolfi, Harry Tuller, Jyrki Lappalainen, Vilho Lantto

BA14 Sensing and integration

Research output: Contribution to journal › Article › Scientific › peer-review

20 Citations (Scopus)

Abstract

Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO₃ (BTO)-SrTiO₃ (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a Si_xN_yfilm deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.

Original language	English
Pages (from-to)	242904-242906
Number of pages	3
Journal	Applied Physics Letters
Volume	89
Issue number	24
DOIs	https://doi.org/10.1063/1.2404982
Publication status	Published - 2006
MoE publication type	A1 Journal article-refereed

Keywords

ferroelectric
waveguide
electro-optic
superlattice

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title = "BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator",

abstract = "Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.",

keywords = "ferroelectric, waveguide, electro-optic, superlattice",

author = "Jussi Hiltunen and Dilan Seneviratne and Rong Sun and Michael Stolfi and Harry Tuller and Jyrki Lappalainen and Vilho Lantto",

note = "Project code: 4678",

year = "2006",

doi = "10.1063/1.2404982",

language = "English",

volume = "89",

pages = "242904--242906",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics (AIP)",

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TY - JOUR

T1 - BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator

AU - Hiltunen, Jussi

AU - Seneviratne, Dilan

AU - Sun, Rong

AU - Stolfi, Michael

AU - Tuller, Harry

AU - Lappalainen, Jyrki

AU - Lantto, Vilho

N1 - Project code: 4678

PY - 2006

Y1 - 2006

N2 - Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.

AB - Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.

KW - ferroelectric

KW - waveguide

KW - electro-optic

KW - superlattice

U2 - 10.1063/1.2404982

DO - 10.1063/1.2404982

M3 - Article

VL - 89

SP - 242904

EP - 242906

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 24

ER -