BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator

Jussi Hiltunen, Dilan Seneviratne, Rong Sun, Michael Stolfi, Harry Tuller, Jyrki Lappalainen, Vilho Lantto

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)

Abstract

Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.
Original languageEnglish
Pages (from-to)242904-242906
Number of pages3
JournalApplied Physics Letters
Volume89
Issue number24
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Fingerprint

electro-optics
modulators
waveguides
thin films
pulsed laser deposition
periodic variations
strip
electrodes
electric fields
output
single crystals
coefficients
cells
diffraction
wavelengths
x rays

Keywords

  • ferroelectric
  • waveguide
  • electro-optic
  • superlattice

Cite this

Hiltunen, J., Seneviratne, D., Sun, R., Stolfi, M., Tuller, H., Lappalainen, J., & Lantto, V. (2006). BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator. Applied Physics Letters, 89(24), 242904-242906. https://doi.org/10.1063/1.2404982
Hiltunen, Jussi ; Seneviratne, Dilan ; Sun, Rong ; Stolfi, Michael ; Tuller, Harry ; Lappalainen, Jyrki ; Lantto, Vilho. / BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator. In: Applied Physics Letters. 2006 ; Vol. 89, No. 24. pp. 242904-242906.
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abstract = "Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.",
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author = "Jussi Hiltunen and Dilan Seneviratne and Rong Sun and Michael Stolfi and Harry Tuller and Jyrki Lappalainen and Vilho Lantto",
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Hiltunen, J, Seneviratne, D, Sun, R, Stolfi, M, Tuller, H, Lappalainen, J & Lantto, V 2006, 'BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator', Applied Physics Letters, vol. 89, no. 24, pp. 242904-242906. https://doi.org/10.1063/1.2404982

BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator. / Hiltunen, Jussi; Seneviratne, Dilan; Sun, Rong; Stolfi, Michael; Tuller, Harry; Lappalainen, Jyrki; Lantto, Vilho.

In: Applied Physics Letters, Vol. 89, No. 24, 2006, p. 242904-242906.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator

AU - Hiltunen, Jussi

AU - Seneviratne, Dilan

AU - Sun, Rong

AU - Stolfi, Michael

AU - Tuller, Harry

AU - Lappalainen, Jyrki

AU - Lantto, Vilho

N1 - Project code: 4678

PY - 2006

Y1 - 2006

N2 - Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.

AB - Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.

KW - ferroelectric

KW - waveguide

KW - electro-optic

KW - superlattice

U2 - 10.1063/1.2404982

DO - 10.1063/1.2404982

M3 - Article

VL - 89

SP - 242904

EP - 242906

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 24

ER -

Hiltunen J, Seneviratne D, Sun R, Stolfi M, Tuller H, Lappalainen J et al. BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator. Applied Physics Letters. 2006;89(24):242904-242906. https://doi.org/10.1063/1.2404982