Abstract
Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.
Original language | English |
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Pages (from-to) | 242904-242906 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 89 |
Issue number | 24 |
DOIs | |
Publication status | Published - 2006 |
MoE publication type | A1 Journal article-refereed |
Keywords
- ferroelectric
- waveguide
- electro-optic
- superlattice