Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 242904-242906 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 89 |
| Issue number | 24 |
| DOIs | |
| Publication status | Published - 2006 |
| MoE publication type | A1 Journal article-refereed |
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Keywords
- ferroelectric
- waveguide
- electro-optic
- superlattice
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BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator. / Hiltunen, Jussi; Seneviratne, Dilan; Sun, Rong; Stolfi, Michael; Tuller, Harry; Lappalainen, Jyrki; Lantto, Vilho.
In: Applied Physics Letters, Vol. 89, No. 24, 2006, p. 242904-242906.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator
AU - Hiltunen, Jussi
AU - Seneviratne, Dilan
AU - Sun, Rong
AU - Stolfi, Michael
AU - Tuller, Harry
AU - Lappalainen, Jyrki
AU - Lantto, Vilho
N1 - Project code: 4678
PY - 2006
Y1 - 2006
N2 - Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.
AB - Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.
KW - ferroelectric
KW - waveguide
KW - electro-optic
KW - superlattice
U2 - 10.1063/1.2404982
DO - 10.1063/1.2404982
M3 - Article
VL - 89
SP - 242904
EP - 242906
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 24
ER -