Projects per year
Abstract
Original language | English |
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Title of host publication | MOEMS and Miniaturized Systems XX |
Editors | Hans Zappe, Wibool Piyawattanametha, Yong-Hwa Park |
Publisher | International Society for Optics and Photonics SPIE |
Number of pages | 12 |
DOIs | |
Publication status | Published - 5 Mar 2021 |
MoE publication type | B3 Non-refereed article in conference proceedings |
Event | International Conference on MOEMS and Miniaturized Systems XX: Online - Virtual, United States Duration: 6 Mar 2021 → 12 Mar 2021 |
Publication series
Series | Proceedings of SPIE |
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Volume | 11697 |
ISSN | 0277-786X |
Conference
Conference | International Conference on MOEMS and Miniaturized Systems XX |
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Abbreviated title | SPIE OPTO |
Country/Territory | United States |
Period | 6/03/21 → 12/03/21 |
Funding
The authors would like to thank national funding authorities and the ECSEL Joint Undertaking, which funded the NewControl project under the grant agreement No. 826653-2. Big thanks to people in Murata Electronics Oy for technical support. Packaging the mirrors with the anodic bonding process and flip-chip mounting to ceramic carriers in Murata Electronics Oy was partially supported by project PRYSTINE: Programmable Systems for Intelligence in Automobiles, funded by Business Finland and ECSEL Joint Undertaking under grant agreement No.783190.
Keywords
- PLL
- digital control
- micromirror
- piezoelectric
- LiDAR
- MEMS
- scanning mirror
Fingerprint
Dive into the research topics of 'Beam-steering MOEMS system based on a resonant piezoMEMS mirror and a phase-locked loop controller'. Together they form a unique fingerprint.Projects
- 1 Finished
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PRYSTINE: Programmable Systems for Intelligence in Automobiles
Pensala, T. (Manager), Ylivaara, O. M. E. (Participant), Morits, D. (Participant) & Kyynäräinen, J. (Participant)
1/05/18 → 30/04/21
Project: EU project