Behavior of aluminum in ozonated water, optical and electrochemical study

Heini Ritala, Kimmo Solehmainen, Leif Grönberg, Antero Pehkonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationCleaning Technology in Semiconductor Device Manufacturing VIII
PublisherElectrochemical Society ECS
Pages406-413
ISBN (Print)1-56677-411-X
Publication statusPublished - 2003
MoE publication typeA4 Article in a conference publication
Event8th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing: Part of the 204th ECS Meeting - Orlando, United States
Duration: 12 Oct 200316 Oct 2003

Publication series

SeriesECS Proceedings Volumes
Volume2003-26
ISSN2576-1579

Conference

Conference8th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
CountryUnited States
CityOrlando
Period12/10/0316/10/03

Cite this

Ritala, H., Solehmainen, K., Grönberg, L., & Pehkonen, A. (2003). Behavior of aluminum in ozonated water, optical and electrochemical study. In Cleaning Technology in Semiconductor Device Manufacturing VIII (pp. 406-413). Electrochemical Society ECS. ECS Proceedings Volumes, Vol.. 2003-26