Benchmarking of 50 nm features in thermal nanoimprint

C. Gourgon (Corresponding Author), N. Chaix, H. Schift, M. Tormen, S. Landis, C. M. Sotomayor Torres, A. Kristensen, R. H. Pedersen, M. B. Christiansen, I. Fernandez-Cuesta, D. Mendels, L. Montelius, Tomi Haatainen

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)

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    Engineering & Materials Science