Bend-size reduction on the SOI rib waveguide platform

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

The minimum bending radius of optical waveguides is typically the most important parameter that defines the footprint and cost of a photonic integrated circuit. In optical fibers and in planar waveguides with equally large mode fields (~10 μm) the bending radii are typically in the cm-scale. The main advantage of using a high index waveguide core with a thickness below 1 μm is the ability to realise single-mode bends with bending radii of just a few micrometers. In this paper we review the dependence of the minimum bending radius on the size and shape of waveguides with the main emphasis on silicon-on-insulator (SOI) waveguides. Then we present simulation and measurement results from advanced waveguide bends and mirrors that have been integrated with 4-10 μm thick single-mode SOI waveguides. We show that multi-step patterning and novel designs allow the reduction of the bending radius by up to three orders of magnitude while also reducing the bending losses by approximately one order of magnitude when compared to traditional rib waveguide bends on 4 μm SOI. This allows to use the μm-scale SOI waveguides for making almost as compact photonic integrated circuits as those based on sub-μm SOI waveguides.
Original languageEnglish
Title of host publicationSilicon Photonics VIII
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-9398-9
DOIs
Publication statusPublished - 2013
MoE publication typeA4 Article in a conference publication
EventSPIE Opto - San Francisco, California, United States
Duration: 2 Feb 20137 Feb 2013

Publication series

NameProceedings of SPIE
Volume8629
ISSN (Print)0277-786X

Conference

ConferenceSPIE Opto
CountryUnited States
CitySan Francisco, California
Period2/02/137/02/13

Fingerprint

platforms
insulators
waveguides
silicon
radii
integrated circuits
photonics
optical waveguides
micrometers
optical fibers
mirrors
costs
simulation

Keywords

  • Silicon photonics; silicon-on-insulator; SOI waveg

Cite this

Aalto, T., Cherchi, M., Harjanne, M., Ylinen, S., & Kapulainen, M. (2013). Bend-size reduction on the SOI rib waveguide platform. In Silicon Photonics VIII [86290D] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8629 https://doi.org/10.1117/12.2002349
Aalto, Timo ; Cherchi, Matteo ; Harjanne, Mikko ; Ylinen, Sami ; Kapulainen, Markku. / Bend-size reduction on the SOI rib waveguide platform. Silicon Photonics VIII. International Society for Optics and Photonics SPIE, 2013. (Proceedings of SPIE, Vol. 8629).
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Aalto, T, Cherchi, M, Harjanne, M, Ylinen, S & Kapulainen, M 2013, Bend-size reduction on the SOI rib waveguide platform. in Silicon Photonics VIII., 86290D, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8629, SPIE Opto, San Francisco, California, United States, 2/02/13. https://doi.org/10.1117/12.2002349

Bend-size reduction on the SOI rib waveguide platform. / Aalto, Timo; Cherchi, Matteo; Harjanne, Mikko; Ylinen, Sami; Kapulainen, Markku.

Silicon Photonics VIII. International Society for Optics and Photonics SPIE, 2013. 86290D (Proceedings of SPIE, Vol. 8629).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AB - The minimum bending radius of optical waveguides is typically the most important parameter that defines the footprint and cost of a photonic integrated circuit. In optical fibers and in planar waveguides with equally large mode fields (~10 μm) the bending radii are typically in the cm-scale. The main advantage of using a high index waveguide core with a thickness below 1 μm is the ability to realise single-mode bends with bending radii of just a few micrometers. In this paper we review the dependence of the minimum bending radius on the size and shape of waveguides with the main emphasis on silicon-on-insulator (SOI) waveguides. Then we present simulation and measurement results from advanced waveguide bends and mirrors that have been integrated with 4-10 μm thick single-mode SOI waveguides. We show that multi-step patterning and novel designs allow the reduction of the bending radius by up to three orders of magnitude while also reducing the bending losses by approximately one order of magnitude when compared to traditional rib waveguide bends on 4 μm SOI. This allows to use the μm-scale SOI waveguides for making almost as compact photonic integrated circuits as those based on sub-μm SOI waveguides.

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Aalto T, Cherchi M, Harjanne M, Ylinen S, Kapulainen M. Bend-size reduction on the SOI rib waveguide platform. In Silicon Photonics VIII. International Society for Optics and Photonics SPIE. 2013. 86290D. (Proceedings of SPIE, Vol. 8629). https://doi.org/10.1117/12.2002349