Benzoylpivaloylmethanide precursors for the chemical beam epitaxy of oxide thin films. 1

Synthesis, characterization, and use of yttrium benzoylpivaloylmethanide

E. Fritsch, E. Mächler, F. Arrouy, Olli Orama, H. Berke, I. Povey, P. Willmott, J.-P. Locquet (Corresponding Author)

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)

Abstract

The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.

Original languageEnglish
Pages (from-to)127 - 134
Number of pages8
JournalChemistry of Materials
Volume9
Issue number1
DOIs
Publication statusPublished - 1997
MoE publication typeA1 Journal article-refereed

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Chemical beam epitaxy
Yttrium
Oxide films
Thin films
Molecular beams
X ray spectroscopy
Acetonitrile
Differential thermal analysis
Deposits
Nuclear magnetic resonance
Fluxes
Substrates

Cite this

Fritsch, E. ; Mächler, E. ; Arrouy, F. ; Orama, Olli ; Berke, H. ; Povey, I. ; Willmott, P. ; Locquet, J.-P. / Benzoylpivaloylmethanide precursors for the chemical beam epitaxy of oxide thin films. 1 : Synthesis, characterization, and use of yttrium benzoylpivaloylmethanide. In: Chemistry of Materials. 1997 ; Vol. 9, No. 1. pp. 127 - 134.
@article{cee67ba430764f1bb2c3222832c6b2d3,
title = "Benzoylpivaloylmethanide precursors for the chemical beam epitaxy of oxide thin films. 1: Synthesis, characterization, and use of yttrium benzoylpivaloylmethanide",
abstract = "The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.",
author = "E. Fritsch and E. M{\"a}chler and F. Arrouy and Olli Orama and H. Berke and I. Povey and P. Willmott and J.-P. Locquet",
note = "Project code: K6SU00079",
year = "1997",
doi = "10.1021/cm9602510",
language = "English",
volume = "9",
pages = "127 -- 134",
journal = "Chemistry of Materials",
issn = "0897-4756",
publisher = "American Chemical Society",
number = "1",

}

Benzoylpivaloylmethanide precursors for the chemical beam epitaxy of oxide thin films. 1 : Synthesis, characterization, and use of yttrium benzoylpivaloylmethanide. / Fritsch, E.; Mächler, E.; Arrouy, F.; Orama, Olli; Berke, H.; Povey, I.; Willmott, P.; Locquet, J.-P. (Corresponding Author).

In: Chemistry of Materials, Vol. 9, No. 1, 1997, p. 127 - 134.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Benzoylpivaloylmethanide precursors for the chemical beam epitaxy of oxide thin films. 1

T2 - Synthesis, characterization, and use of yttrium benzoylpivaloylmethanide

AU - Fritsch, E.

AU - Mächler, E.

AU - Arrouy, F.

AU - Orama, Olli

AU - Berke, H.

AU - Povey, I.

AU - Willmott, P.

AU - Locquet, J.-P.

N1 - Project code: K6SU00079

PY - 1997

Y1 - 1997

N2 - The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.

AB - The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.

U2 - 10.1021/cm9602510

DO - 10.1021/cm9602510

M3 - Article

VL - 9

SP - 127

EP - 134

JO - Chemistry of Materials

JF - Chemistry of Materials

SN - 0897-4756

IS - 1

ER -