@inproceedings{e544bd246c044857b294d4175b05b273,
title = "Bidirectional method for optical channel wavequide attenuation measurement by detectors integrated on the wafer",
abstract = "A new on-wafer bidirectional nondestructive measurement method is demonstrated for measuring losses in three dimensional integrated optical waveguides. A thermally oxidized silicon wafer is used as substrate for silicon nitride multimode waveguides. The measurement is based on p-i-n photodetectors integrated near the waveguide. In order to eliminate the effect of different sensitivities of adjacent p-i-n detectors, the light is launched separately to both ends of the waveguide. The method can be applied to test structures in optoelectronic integrated circuits (OEIC's).",
author = "Jaakko Aarnio and Matti Leppihalme",
note = "CA: PUO; OE/Fibers '89 ; Conference date: 05-09-1989 Through 08-09-1989",
year = "1989",
doi = "10.1117/12.963331",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Leon McCaughan and Mentzer, {Mark A.} and Song-Tsuen Peng and Wojtunik, {Henry J.} and Wong, {Ka Kha}",
booktitle = "Integrated Optics and Optoelectronics",
address = "United States",
}