Bidirectional method for optical channel wavequide attenuation measurement by detectors integrated on the wafer

Jaakko Aarnio, Matti Leppihalme

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

A new on-wafer bidirectional nondestructive measurement method is demonstrated for measuring losses in three dimensional integrated optical waveguides. A thermally oxidized silicon wafer is used as substrate for silicon nitride multimode waveguides. The measurement is based on p-i-n photodetectors integrated near the waveguide. In order to eliminate the effect of different sensitivities of adjacent p-i-n detectors, the light is launched separately to both ends of the waveguide. The method can be applied to test structures in optoelectronic integrated circuits (OEIC's).
Original languageEnglish
Title of host publicationIntegrated Optics and Optoelectronics
EditorsLeon McCaughan, Mark A. Mentzer, Song-Tsuen Peng, Henry J. Wojtunik, Ka Kha Wong
PublisherInternational Society for Optics and Photonics SPIE
DOIs
Publication statusPublished - 1989
MoE publication typeA4 Article in a conference publication
EventOE/Fibers '89 - Boston, United States
Duration: 5 Sep 19898 Sep 1989

Publication series

SeriesProceedings of SPIE
Volume1177
ISSN0277-786X

Conference

ConferenceOE/Fibers '89
CountryUnited States
CityBoston
Period5/09/898/09/89

Fingerprint

attenuation
wafers
waveguides
detectors
silicon nitrides
optical waveguides
integrated circuits
photometers
sensitivity
silicon

Cite this

Aarnio, J., & Leppihalme, M. (1989). Bidirectional method for optical channel wavequide attenuation measurement by detectors integrated on the wafer. In L. McCaughan, M. A. Mentzer, S-T. Peng, H. J. Wojtunik, & K. K. Wong (Eds.), Integrated Optics and Optoelectronics International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 1177 https://doi.org/10.1117/12.963331
Aarnio, Jaakko ; Leppihalme, Matti. / Bidirectional method for optical channel wavequide attenuation measurement by detectors integrated on the wafer. Integrated Optics and Optoelectronics. editor / Leon McCaughan ; Mark A. Mentzer ; Song-Tsuen Peng ; Henry J. Wojtunik ; Ka Kha Wong. International Society for Optics and Photonics SPIE, 1989. (Proceedings of SPIE, Vol. 1177).
@inproceedings{e544bd246c044857b294d4175b05b273,
title = "Bidirectional method for optical channel wavequide attenuation measurement by detectors integrated on the wafer",
abstract = "A new on-wafer bidirectional nondestructive measurement method is demonstrated for measuring losses in three dimensional integrated optical waveguides. A thermally oxidized silicon wafer is used as substrate for silicon nitride multimode waveguides. The measurement is based on p-i-n photodetectors integrated near the waveguide. In order to eliminate the effect of different sensitivities of adjacent p-i-n detectors, the light is launched separately to both ends of the waveguide. The method can be applied to test structures in optoelectronic integrated circuits (OEIC's).",
author = "Jaakko Aarnio and Matti Leppihalme",
note = "CA: PUO",
year = "1989",
doi = "10.1117/12.963331",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Leon McCaughan and Mentzer, {Mark A.} and Song-Tsuen Peng and Wojtunik, {Henry J.} and Wong, {Ka Kha}",
booktitle = "Integrated Optics and Optoelectronics",
address = "United States",

}

Aarnio, J & Leppihalme, M 1989, Bidirectional method for optical channel wavequide attenuation measurement by detectors integrated on the wafer. in L McCaughan, MA Mentzer, S-T Peng, HJ Wojtunik & KK Wong (eds), Integrated Optics and Optoelectronics. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 1177, OE/Fibers '89, Boston, United States, 5/09/89. https://doi.org/10.1117/12.963331

Bidirectional method for optical channel wavequide attenuation measurement by detectors integrated on the wafer. / Aarnio, Jaakko; Leppihalme, Matti.

Integrated Optics and Optoelectronics. ed. / Leon McCaughan; Mark A. Mentzer; Song-Tsuen Peng; Henry J. Wojtunik; Ka Kha Wong. International Society for Optics and Photonics SPIE, 1989. (Proceedings of SPIE, Vol. 1177).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Bidirectional method for optical channel wavequide attenuation measurement by detectors integrated on the wafer

AU - Aarnio, Jaakko

AU - Leppihalme, Matti

N1 - CA: PUO

PY - 1989

Y1 - 1989

N2 - A new on-wafer bidirectional nondestructive measurement method is demonstrated for measuring losses in three dimensional integrated optical waveguides. A thermally oxidized silicon wafer is used as substrate for silicon nitride multimode waveguides. The measurement is based on p-i-n photodetectors integrated near the waveguide. In order to eliminate the effect of different sensitivities of adjacent p-i-n detectors, the light is launched separately to both ends of the waveguide. The method can be applied to test structures in optoelectronic integrated circuits (OEIC's).

AB - A new on-wafer bidirectional nondestructive measurement method is demonstrated for measuring losses in three dimensional integrated optical waveguides. A thermally oxidized silicon wafer is used as substrate for silicon nitride multimode waveguides. The measurement is based on p-i-n photodetectors integrated near the waveguide. In order to eliminate the effect of different sensitivities of adjacent p-i-n detectors, the light is launched separately to both ends of the waveguide. The method can be applied to test structures in optoelectronic integrated circuits (OEIC's).

U2 - 10.1117/12.963331

DO - 10.1117/12.963331

M3 - Conference article in proceedings

T3 - Proceedings of SPIE

BT - Integrated Optics and Optoelectronics

A2 - McCaughan, Leon

A2 - Mentzer, Mark A.

A2 - Peng, Song-Tsuen

A2 - Wojtunik, Henry J.

A2 - Wong, Ka Kha

PB - International Society for Optics and Photonics SPIE

ER -

Aarnio J, Leppihalme M. Bidirectional method for optical channel wavequide attenuation measurement by detectors integrated on the wafer. In McCaughan L, Mentzer MA, Peng S-T, Wojtunik HJ, Wong KK, editors, Integrated Optics and Optoelectronics. International Society for Optics and Photonics SPIE. 1989. (Proceedings of SPIE, Vol. 1177). https://doi.org/10.1117/12.963331