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Simulation Study
100%
Binary Collision
100%
Lattice Simulations
100%
Monocrystalline
100%
Interaction Potential
80%
Angular Distribution
40%
Electronic Stopping
40%
Atom-atom Interactions
40%
Sputtering Yield
20%
Screening Length
20%
Parameter Dependence
20%
Simulation Code
20%
Minor Effect
20%
Ejection
20%
Interaction Effect
20%
Ar Ions
20%
Sputtered Particles
20%
Yield Distribution
20%
Impact Parameter
20%
Iron Atom
20%
Simultaneous Collisions
20%
(111) Surface
20%
Frictional Parameters
20%
Inelastic Energy Loss
20%
INIS
simulation
100%
sputtering
100%
atoms
100%
collisions
100%
potentials
62%
interactions
50%
yields
50%
losses
25%
ions
25%
angular distribution
25%
surfaces
12%
length
12%
sensitivity
12%
iron
12%
particles
12%
kev range
12%
screening
12%
connections
12%
energy losses
12%
argon ions
12%
impact parameter
12%
Engineering
Model Parameter
100%
Interaction Potential
100%
Monocrystalline
100%
Angular Distribution
50%
Experimental Result
25%
Good Agreement
25%
Energy Dissipation
25%
Simulation Code
25%
Minor Effect
25%
Sputtering Yield
25%
Sputtered Particle
25%
Potential Function
25%
Chemistry
electronics
100%
Iron Atom
33%
Argon Ion
33%
Physics
Angular Distribution
100%
Iron
50%