Biocompatible ALD barrier coatings for medical devices

Mikko Matvejeff, Satu Ek, Riina Ritasalo, Jesse Kalliomäki, Päivi Järvinen, Oili Ylivaara, Erik Östreng

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

Atomic layer deposition (ALD) is widely in use for depositing a variety of materials, such as metal oxides, metal nitrides and metals, in a conformal and defect-free form at low temperatures on high aspect-ratio substrates. These advantages make ALD uniquely powerful method for applications where sensitive substrate materials combine with extreme demands on coating quality and temperature/chemical resistance, such as those often seen in the medical applications.
Original languageEnglish
Title of host publicationProceedings of 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages56-58
Number of pages3
ISBN (Electronic)978-1-5090-4660-7
ISBN (Print)978-1-5090-4661-4
DOIs
Publication statusPublished - 13 Jun 2017
MoE publication typeA4 Article in a conference publication
EventElectron Devices Technology and Manufacturing Coneference, EDTM 2017 - Toyama, Japan
Duration: 28 Feb 20172 Mar 2017

Conference

ConferenceElectron Devices Technology and Manufacturing Coneference, EDTM 2017
Abbreviated titleEDTM 2017
CountryJapan
CityToyama
Period28/02/172/03/17

Fingerprint

Atomic layer deposition
Coatings
Metals
Chemical resistance
Medical applications
Substrates
Nitrides
Aspect ratio
Temperature
Defects
Oxides

Keywords

  • atomic layer deposition
  • ALD
  • medical device and barrier layer

Cite this

Matvejeff, M., Ek, S., Ritasalo, R., Kalliomäki, J., Järvinen, P., Ylivaara, O., & Östreng, E. (2017). Biocompatible ALD barrier coatings for medical devices. In Proceedings of 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) (pp. 56-58). [7947504] IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/EDTM.2017.7947504
Matvejeff, Mikko ; Ek, Satu ; Ritasalo, Riina ; Kalliomäki, Jesse ; Järvinen, Päivi ; Ylivaara, Oili ; Östreng, Erik. / Biocompatible ALD barrier coatings for medical devices. Proceedings of 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM). IEEE Institute of Electrical and Electronic Engineers , 2017. pp. 56-58
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Matvejeff, M, Ek, S, Ritasalo, R, Kalliomäki, J, Järvinen, P, Ylivaara, O & Östreng, E 2017, Biocompatible ALD barrier coatings for medical devices. in Proceedings of 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM)., 7947504, IEEE Institute of Electrical and Electronic Engineers , pp. 56-58, Electron Devices Technology and Manufacturing Coneference, EDTM 2017, Toyama, Japan, 28/02/17. https://doi.org/10.1109/EDTM.2017.7947504

Biocompatible ALD barrier coatings for medical devices. / Matvejeff, Mikko; Ek, Satu; Ritasalo, Riina; Kalliomäki, Jesse; Järvinen, Päivi; Ylivaara, Oili; Östreng, Erik.

Proceedings of 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM). IEEE Institute of Electrical and Electronic Engineers , 2017. p. 56-58 7947504.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Matvejeff M, Ek S, Ritasalo R, Kalliomäki J, Järvinen P, Ylivaara O et al. Biocompatible ALD barrier coatings for medical devices. In Proceedings of 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM). IEEE Institute of Electrical and Electronic Engineers . 2017. p. 56-58. 7947504 https://doi.org/10.1109/EDTM.2017.7947504