Abstract
The design, fabrication and characterisation of
birefringent silicon oxynitride planar optical waveguides are described
for applications at the wavelength of 1.54 mu m. Form birefringence is
attained by interposing a thin silicon nitride film in the waveguide
stack, and can be controlled by adjusting the nitride layer thickness.
Dispersion characteristics of the oxynitride waveguides have been
measured and compared with theory.
| Original language | English |
|---|---|
| Pages (from-to) | 2317 - 2318 |
| Number of pages | 2 |
| Journal | Electronics Letters |
| Volume | 27 |
| Issue number | 25 |
| DOIs | |
| Publication status | Published - 1991 |
| MoE publication type | A1 Journal article-refereed |