Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides

Jaakko Aarnio, Päivi Heimala, M. Del Giudice, F Bruno

    Research output: Contribution to journalArticleScientificpeer-review

    13 Citations (Scopus)

    Abstract

    The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.
    Original languageEnglish
    Pages (from-to)2317 - 2318
    Number of pages2
    JournalElectronics Letters
    Volume27
    Issue number25
    DOIs
    Publication statusPublished - 1991
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Optical waveguides
    Birefringence
    Waveguides
    Silicon
    Planar waveguides
    Silicon nitride
    Nitrides
    Fabrication
    Wavelength

    Cite this

    Aarnio, Jaakko ; Heimala, Päivi ; Del Giudice, M. ; Bruno, F. / Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides. In: Electronics Letters. 1991 ; Vol. 27, No. 25. pp. 2317 - 2318.
    @article{75b4367bf94e43748820a93994f53717,
    title = "Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides",
    abstract = "The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.",
    author = "Jaakko Aarnio and P{\"a}ivi Heimala and {Del Giudice}, M. and F Bruno",
    note = "Project code: puo8004",
    year = "1991",
    doi = "10.1049/el:19911435",
    language = "English",
    volume = "27",
    pages = "2317 -- 2318",
    journal = "Electronics Letters",
    issn = "0013-5194",
    publisher = "Institution of Engineering and Technology IET",
    number = "25",

    }

    Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides. / Aarnio, Jaakko; Heimala, Päivi; Del Giudice, M.; Bruno, F.

    In: Electronics Letters, Vol. 27, No. 25, 1991, p. 2317 - 2318.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides

    AU - Aarnio, Jaakko

    AU - Heimala, Päivi

    AU - Del Giudice, M.

    AU - Bruno, F

    N1 - Project code: puo8004

    PY - 1991

    Y1 - 1991

    N2 - The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.

    AB - The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.

    U2 - 10.1049/el:19911435

    DO - 10.1049/el:19911435

    M3 - Article

    VL - 27

    SP - 2317

    EP - 2318

    JO - Electronics Letters

    JF - Electronics Letters

    SN - 0013-5194

    IS - 25

    ER -