Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides

Jaakko Aarnio, Päivi Heimala, M. Del Giudice, F Bruno

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    The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.
    Original languageEnglish
    Pages (from-to)2317 - 2318
    Number of pages2
    JournalElectronics Letters
    Issue number25
    Publication statusPublished - 1991
    MoE publication typeA1 Journal article-refereed


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