Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides

Jaakko Aarnio, Päivi Heimala, M. Del Giudice, F Bruno

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)

Abstract

The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.
Original languageEnglish
Pages (from-to)2317 - 2318
Number of pages2
JournalElectronics Letters
Volume27
Issue number25
DOIs
Publication statusPublished - 1991
MoE publication typeA1 Journal article-refereed

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Optical waveguides
Birefringence
Waveguides
Silicon
Planar waveguides
Silicon nitride
Nitrides
Fabrication
Wavelength

Cite this

Aarnio, Jaakko ; Heimala, Päivi ; Del Giudice, M. ; Bruno, F. / Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides. In: Electronics Letters. 1991 ; Vol. 27, No. 25. pp. 2317 - 2318.
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abstract = "The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.",
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Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides. / Aarnio, Jaakko; Heimala, Päivi; Del Giudice, M.; Bruno, F.

In: Electronics Letters, Vol. 27, No. 25, 1991, p. 2317 - 2318.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides

AU - Aarnio, Jaakko

AU - Heimala, Päivi

AU - Del Giudice, M.

AU - Bruno, F

N1 - Project code: puo8004

PY - 1991

Y1 - 1991

N2 - The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.

AB - The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.

U2 - 10.1049/el:19911435

DO - 10.1049/el:19911435

M3 - Article

VL - 27

SP - 2317

EP - 2318

JO - Electronics Letters

JF - Electronics Letters

SN - 0013-5194

IS - 25

ER -