Keyphrases
Waveguide
100%
Birefringence
100%
Optical Waveguides
100%
Silicon Oxynitride (SiON)
100%
Dispersion Characteristics
100%
Control Characteristics
100%
Layer Thickness
50%
Nitrided Layer
50%
Thin-film Silicon
50%
Planar Optical Waveguide
50%
Oxynitride
50%
Silicon Nitride Film
50%
Form Birefringence
50%
Birefringent
50%
INIS
control
100%
silicon
100%
dispersions
100%
waveguides
100%
birefringence
100%
layers
25%
comparative evaluations
25%
applications
25%
thickness
25%
design
25%
films
25%
wavelengths
25%
stacks
25%
fabrication
25%
nitrides
25%
silicon nitrides
25%
Material Science
Waveguide
100%
Birefringence
100%
Silicon
100%
Oxynitride
100%
Silicon Nitride
25%
Nitride Compound
25%
Film
25%