Bonded and mechanically thinned pre-etched SOI structures

Tommi Suni, Kimmo Henttinen, Hannu Luoto, James Dekker, Jari Mäkinen, Altti Torkkeli

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationEuroSOI2006, conference proceedings
    Pages121-122
    Publication statusPublished - 2006
    MoE publication typeNot Eligible
    EventEuroSOI 2006 - Grenoble, France
    Duration: 8 Mar 200610 Mar 2006

    Conference

    ConferenceEuroSOI 2006
    CountryFrance
    CityGrenoble
    Period8/03/0610/03/06

    Keywords

    • Pre-patterned SOI
    • wafer bonding
    • mechanical thinning

    Cite this

    Suni, T., Henttinen, K., Luoto, H., Dekker, J., Mäkinen, J., & Torkkeli, A. (2006). Bonded and mechanically thinned pre-etched SOI structures. In EuroSOI2006, conference proceedings (pp. 121-122)