@inproceedings{3028d41faae9436f962cf5a7d8563462,
title = "Bonded and mechanically thinned pre-etched SOI structures",
keywords = "Pre-patterned SOI, wafer bonding, mechanical thinning",
author = "Tommi Suni and Kimmo Henttinen and Hannu Luoto and James Dekker and Jari M{\"a}kinen and Altti Torkkeli",
note = "No ISBN or other bibliographic metadata found for the proceedings; EuroSOI 2006 ; Conference date: 08-03-2006 Through 10-03-2006",
year = "2006",
language = "English",
pages = "121--122",
booktitle = "EuroSOI2006, conference proceedings",
}