Bonded thick film SOI with pre-etched cavities

Tommi Suni (Corresponding Author), Kimmo Henttinen, James Dekker, Hannu Luoto, Martin Kulawski, Jari Mäkinen, Risto Mutikainen

Research output: Contribution to journal › Article › Scientific › peer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Bonded thick film SOI with pre-etched cavities'. Together they form a unique fingerprint.

Keyphrases

INIS

Engineering

Material Science