Bragg reflectors for large optical aperture MEMS fabry-perot interferometers

Anna Rissanen, Rami Mannila, Jarkko Antila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

9 Citations (Scopus)

Abstract

This paper presents the fabrication of large-aperture low-pressure chemical-vapour deposited (LPCVD) Bragg reflectors utilizing low-stress polysilicon (PolySi) and silicon-rich silicon nitride (SiN) ?/4-thin film stacks. These structures can function as the upper mirror in a MEMS FPI device. High aspect-ratio mirror membranes were successfully released for 5 - 10 mm diameter range by sacrificial SiO2 etching in HF vapour. Optical simulations are presented for the Bragg reflector test structures designed for FPIs operating in the NIR range and the properties such as release yield and mechanical stability of the released LPCVD deposited polySi-SiN mirror membranes are compared with similar released atomic layer deposited (ALD) Al2O3-TiO2 ?/4-thin film mirror stacks. The realization of these Bragg reflector structures is the first step in the process integration of large-aperture MEMS FPI for miniature NIR imaging spectrometers, which can be applied to a variety of applications ranging from medical imaging and diagnostics to spaceand environmental monitoring instrumentation
Original languageEnglish
Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications IV
EditorsGeorge Tom
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-9051-3
DOIs
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication
EventMicro- and Nanotechnology Sensors, Systems, and Applications IV - Baltimore, MD, United States
Duration: 23 Apr 201227 Apr 2012

Publication series

SeriesProceedings of SPIE
Volume8373
ISSN0277-786X

Conference

ConferenceMicro- and Nanotechnology Sensors, Systems, and Applications IV
CountryUnited States
CityBaltimore, MD
Period23/04/1227/04/12

Fingerprint

Fabry-Perot interferometers
Bragg reflectors
microelectromechanical systems
apertures
mirrors
vapors
silicon nitrides
low pressure
membranes
environmental monitoring
imaging spectrometers
thin films
high aspect ratio
etching
fabrication
silicon
simulation

Keywords

  • Bragg mirror
  • imaging
  • mems fabry-perot interferometer
  • spectroscopy

Cite this

Rissanen, A., Mannila, R., & Antila, J. (2012). Bragg reflectors for large optical aperture MEMS fabry-perot interferometers. In G. Tom (Ed.), Micro- and Nanotechnology Sensors, Systems, and Applications IV [83732R] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8373 https://doi.org/10.1117/12.920578
Rissanen, Anna ; Mannila, Rami ; Antila, Jarkko. / Bragg reflectors for large optical aperture MEMS fabry-perot interferometers. Micro- and Nanotechnology Sensors, Systems, and Applications IV. editor / George Tom. International Society for Optics and Photonics SPIE, 2012. (Proceedings of SPIE, Vol. 8373).
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Rissanen, A, Mannila, R & Antila, J 2012, Bragg reflectors for large optical aperture MEMS fabry-perot interferometers. in G Tom (ed.), Micro- and Nanotechnology Sensors, Systems, and Applications IV., 83732R, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8373, Micro- and Nanotechnology Sensors, Systems, and Applications IV, Baltimore, MD, United States, 23/04/12. https://doi.org/10.1117/12.920578

Bragg reflectors for large optical aperture MEMS fabry-perot interferometers. / Rissanen, Anna; Mannila, Rami; Antila, Jarkko.

Micro- and Nanotechnology Sensors, Systems, and Applications IV. ed. / George Tom. International Society for Optics and Photonics SPIE, 2012. 83732R (Proceedings of SPIE, Vol. 8373).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AB - This paper presents the fabrication of large-aperture low-pressure chemical-vapour deposited (LPCVD) Bragg reflectors utilizing low-stress polysilicon (PolySi) and silicon-rich silicon nitride (SiN) ?/4-thin film stacks. These structures can function as the upper mirror in a MEMS FPI device. High aspect-ratio mirror membranes were successfully released for 5 - 10 mm diameter range by sacrificial SiO2 etching in HF vapour. Optical simulations are presented for the Bragg reflector test structures designed for FPIs operating in the NIR range and the properties such as release yield and mechanical stability of the released LPCVD deposited polySi-SiN mirror membranes are compared with similar released atomic layer deposited (ALD) Al2O3-TiO2 ?/4-thin film mirror stacks. The realization of these Bragg reflector structures is the first step in the process integration of large-aperture MEMS FPI for miniature NIR imaging spectrometers, which can be applied to a variety of applications ranging from medical imaging and diagnostics to spaceand environmental monitoring instrumentation

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Rissanen A, Mannila R, Antila J. Bragg reflectors for large optical aperture MEMS fabry-perot interferometers. In Tom G, editor, Micro- and Nanotechnology Sensors, Systems, and Applications IV. International Society for Optics and Photonics SPIE. 2012. 83732R. (Proceedings of SPIE, Vol. 8373). https://doi.org/10.1117/12.920578