Bragg reflectors for large optical aperture MEMS fabry-perot interferometers

Anna Rissanen, Rami Mannila, Jarkko Antila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    12 Citations (Scopus)


    This paper presents the fabrication of large-aperture low-pressure chemical-vapour deposited (LPCVD) Bragg reflectors utilizing low-stress polysilicon (PolySi) and silicon-rich silicon nitride (SiN) ?/4-thin film stacks. These structures can function as the upper mirror in a MEMS FPI device. High aspect-ratio mirror membranes were successfully released for 5 - 10 mm diameter range by sacrificial SiO2 etching in HF vapour. Optical simulations are presented for the Bragg reflector test structures designed for FPIs operating in the NIR range and the properties such as release yield and mechanical stability of the released LPCVD deposited polySi-SiN mirror membranes are compared with similar released atomic layer deposited (ALD) Al2O3-TiO2 ?/4-thin film mirror stacks. The realization of these Bragg reflector structures is the first step in the process integration of large-aperture MEMS FPI for miniature NIR imaging spectrometers, which can be applied to a variety of applications ranging from medical imaging and diagnostics to spaceand environmental monitoring instrumentation
    Original languageEnglish
    Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications IV
    EditorsGeorge Tom
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-0-8194-9051-3
    Publication statusPublished - 2012
    MoE publication typeA4 Article in a conference publication
    EventMicro- and Nanotechnology Sensors, Systems, and Applications IV - Baltimore, MD, United States
    Duration: 23 Apr 201227 Apr 2012

    Publication series

    SeriesProceedings of SPIE


    ConferenceMicro- and Nanotechnology Sensors, Systems, and Applications IV
    Country/TerritoryUnited States
    CityBaltimore, MD


    • Bragg mirror
    • imaging
    • mems fabry-perot interferometer
    • spectroscopy


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