Bulge testing of freestanding ALD thin film membranes

Oili Ylivaara, Pekka Törmä, Ingmar Stuns, Jaakko Saarilahti, Riikka Puurunen

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2017
    Event17th International Conference on Atomic Layer Deposition, ALD 2017 - Denver, United States
    Duration: 15 Jul 201718 Jul 2017

    Conference

    Conference17th International Conference on Atomic Layer Deposition, ALD 2017
    Abbreviated titleALD 2017
    CountryUnited States
    CityDenver
    Period15/07/1718/07/17

    Keywords

    • ALD
    • atomic layer deposition
    • bulge testing
    • mechanical characterization

    Cite this

    Ylivaara, O., Törmä, P., Stuns, I., Saarilahti, J., & Puurunen, R. (2017). Bulge testing of freestanding ALD thin film membranes. Abstract from 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States.
    Ylivaara, Oili ; Törmä, Pekka ; Stuns, Ingmar ; Saarilahti, Jaakko ; Puurunen, Riikka. / Bulge testing of freestanding ALD thin film membranes. Abstract from 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States.
    @conference{fbc32fc4e3c04b799466fd1603e86a08,
    title = "Bulge testing of freestanding ALD thin film membranes",
    keywords = "ALD, atomic layer deposition, bulge testing, mechanical characterization",
    author = "Oili Ylivaara and Pekka T{\"o}rm{\"a} and Ingmar Stuns and Jaakko Saarilahti and Riikka Puurunen",
    note = "Project code: 102086; 17th International Conference on Atomic Layer Deposition, ALD 2017, ALD 2017 ; Conference date: 15-07-2017 Through 18-07-2017",
    year = "2017",
    language = "English",

    }

    Ylivaara, O, Törmä, P, Stuns, I, Saarilahti, J & Puurunen, R 2017, 'Bulge testing of freestanding ALD thin film membranes', 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States, 15/07/17 - 18/07/17.

    Bulge testing of freestanding ALD thin film membranes. / Ylivaara, Oili; Törmä, Pekka; Stuns, Ingmar; Saarilahti, Jaakko; Puurunen, Riikka.

    2017. Abstract from 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States.

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    TY - CONF

    T1 - Bulge testing of freestanding ALD thin film membranes

    AU - Ylivaara, Oili

    AU - Törmä, Pekka

    AU - Stuns, Ingmar

    AU - Saarilahti, Jaakko

    AU - Puurunen, Riikka

    N1 - Project code: 102086

    PY - 2017

    Y1 - 2017

    KW - ALD

    KW - atomic layer deposition

    KW - bulge testing

    KW - mechanical characterization

    UR - https://www.pathlms.com/avstechnicallibrary/events/937/video_presentations/75409

    M3 - Conference Abstract

    ER -

    Ylivaara O, Törmä P, Stuns I, Saarilahti J, Puurunen R. Bulge testing of freestanding ALD thin film membranes. 2017. Abstract from 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States.