Bulge testing of freestanding ALD thin film membranes

Oili Ylivaara, Pekka Törmä, Ingmar Stuns, Jaakko Saarilahti, Riikka Puurunen

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 2017
Event17th International Conference on Atomic Layer Deposition, ALD 2017 - Denver, United States
Duration: 15 Jul 201718 Jul 2017

Conference

Conference17th International Conference on Atomic Layer Deposition, ALD 2017
Abbreviated titleALD 2017
CountryUnited States
CityDenver
Period15/07/1718/07/17

Keywords

  • ALD
  • atomic layer deposition
  • bulge testing
  • mechanical characterization

Cite this

Ylivaara, O., Törmä, P., Stuns, I., Saarilahti, J., & Puurunen, R. (2017). Bulge testing of freestanding ALD thin film membranes. Abstract from 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States.
Ylivaara, Oili ; Törmä, Pekka ; Stuns, Ingmar ; Saarilahti, Jaakko ; Puurunen, Riikka. / Bulge testing of freestanding ALD thin film membranes. Abstract from 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States.
@conference{fbc32fc4e3c04b799466fd1603e86a08,
title = "Bulge testing of freestanding ALD thin film membranes",
keywords = "ALD, atomic layer deposition, bulge testing, mechanical characterization",
author = "Oili Ylivaara and Pekka T{\"o}rm{\"a} and Ingmar Stuns and Jaakko Saarilahti and Riikka Puurunen",
note = "Project code: 102086; 17th International Conference on Atomic Layer Deposition, ALD 2017, ALD 2017 ; Conference date: 15-07-2017 Through 18-07-2017",
year = "2017",
language = "English",

}

Ylivaara, O, Törmä, P, Stuns, I, Saarilahti, J & Puurunen, R 2017, 'Bulge testing of freestanding ALD thin film membranes' 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States, 15/07/17 - 18/07/17, .

Bulge testing of freestanding ALD thin film membranes. / Ylivaara, Oili; Törmä, Pekka; Stuns, Ingmar; Saarilahti, Jaakko; Puurunen, Riikka.

2017. Abstract from 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

TY - CONF

T1 - Bulge testing of freestanding ALD thin film membranes

AU - Ylivaara, Oili

AU - Törmä, Pekka

AU - Stuns, Ingmar

AU - Saarilahti, Jaakko

AU - Puurunen, Riikka

N1 - Project code: 102086

PY - 2017

Y1 - 2017

KW - ALD

KW - atomic layer deposition

KW - bulge testing

KW - mechanical characterization

UR - https://www.pathlms.com/avstechnicallibrary/events/937/video_presentations/75409

M3 - Conference Abstract

ER -

Ylivaara O, Törmä P, Stuns I, Saarilahti J, Puurunen R. Bulge testing of freestanding ALD thin film membranes. 2017. Abstract from 17th International Conference on Atomic Layer Deposition, ALD 2017, Denver, United States.