Bulge testing of freestanding ALD thin film membranes

Oili Ylivaara, Pekka Törmä, Ingmar Stuns, Jaakko Saarilahti, Riikka Puurunen

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2017
    Event17th International Conference on Atomic Layer Deposition, ALD 2017 - Denver, United States
    Duration: 15 Jul 201718 Jul 2017

    Conference

    Conference17th International Conference on Atomic Layer Deposition, ALD 2017
    Abbreviated titleALD 2017
    CountryUnited States
    CityDenver
    Period15/07/1718/07/17

    Keywords

    • ALD
    • atomic layer deposition
    • bulge testing
    • mechanical characterization

    Cite this