Bulge testing of freestanding ALD thin film membranes

Oili Ylivaara; Pekka Törmä; Ingmar Stuns; Jaakko Saarilahti; Riikka Puurunen

Bulge testing of freestanding ALD thin film membranes

Oili Ylivaara
, Pekka Törmä
, Ingmar Stuns
, Jaakko Saarilahti
, Riikka Puurunen

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2017
Event	17th International Conference on Atomic Layer Deposition, ALD 2017 - Denver, United States Duration: 15 Jul 2017 → 18 Jul 2017

Conference

Conference	17th International Conference on Atomic Layer Deposition, ALD 2017
Abbreviated title	ALD 2017
Country/Territory	United States
City	Denver
Period	15/07/17 → 18/07/17

Keywords

ALD
atomic layer deposition
bulge testing
mechanical characterization

Cite this

@conference{fbc32fc4e3c04b799466fd1603e86a08,

title = "Bulge testing of freestanding ALD thin film membranes",

keywords = "ALD, atomic layer deposition, bulge testing, mechanical characterization",

author = "Oili Ylivaara and Pekka T{\"o}rm{\"a} and Ingmar Stuns and Jaakko Saarilahti and Riikka Puurunen",

note = "Project code: 102086; 17th International Conference on Atomic Layer Deposition, ALD 2017, ALD 2017 ; Conference date: 15-07-2017 Through 18-07-2017",

year = "2017",

language = "English",

}

TY - CONF

T1 - Bulge testing of freestanding ALD thin film membranes

AU - Ylivaara, Oili

AU - Törmä, Pekka

AU - Stuns, Ingmar

AU - Saarilahti, Jaakko

AU - Puurunen, Riikka

N1 - Project code: 102086

PY - 2017

Y1 - 2017

KW - ALD

KW - atomic layer deposition

KW - bulge testing

KW - mechanical characterization

UR - https://www.pathlms.com/avstechnicallibrary/events/937/video_presentations/75409

M3 - Conference Abstract

T2 - 17th International Conference on Atomic Layer Deposition, ALD 2017

Y2 - 15 July 2017 through 18 July 2017

ER -

Bulge testing of freestanding ALD thin film membranes

Conference

Keywords

Other files and links

ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition

Cite this

Bulge testing of freestanding ALD thin film membranes

Conference

Keywords

Other files and links

Projects

ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition

Cite this