Bulge testing of freestanding ALD thin film membranes

Oili Ylivaara, Pekka Törmä, Ingmar Stuns, Jaakko Saarilahti, Riikka Puurunen

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

1 Finished

1 results

Finished
ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition
Ylivaara, O. M. E., Ahopelto, J., Puurunen, R. L. & Grigoras, K.
1/01/12 → 31/12/17
Project: Academy of Finland project