Calibration of A 130 Pa CDG: Comparison of the results from MIKES, PTB and MKS Deutschland

Markku Rantanen, Sari Semenoja

Research output: Book/ReportReport

Abstract

A 130 Pa capacitance diaphragm vacuum gauge was calibrated in three pressure laboratories during September and October of 2002: at first in the MKS Instruments Deutschland GmbH, then in Physikalisch-Technische Bundesanstalt (PTB) and finally in the Centre for Metrology and Accreditation (MIKES). This offers an excellent opportunity to compare the results from the three laboratories.
Original languageEnglish
Place of PublicationHelsinki
PublisherCentre of Metrology and Accreditation
Number of pages11
ISBN (Print)952-5209-72-5
Publication statusPublished - 2002
MoE publication typeD4 Published development or research report or study

Publication series

SeriesMIKES Publication
VolumeJ6
ISSN1235-5704

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  • Cite this

    Rantanen, M., & Semenoja, S. (2002). Calibration of A 130 Pa CDG: Comparison of the results from MIKES, PTB and MKS Deutschland. Centre of Metrology and Accreditation. MIKES Publication, Vol.. J6 http://www.vtt.fi/inf/pdf/MIKES/2002-J6.pdf