Calibration of a commercial AFM: traceability for a coordinate system

V. Korpelainen (Corresponding Author), A. Lassila

Research output: Contribution to journalArticleScientificpeer-review

39 Citations (Scopus)

Abstract

Traceability of measurements and calibration of devices are needed also at the nanometre scale. Calibration of a commercial atomic force microscope (AFM) was studied as part of a dimensional nanometrology project at MIKES. The calibration procedure and results are presented here. The metrological properties of the AFM were characterized by several measurements. A method developed to calibrate the z scale by a laser interferometer during a normal measurement mode of an AFM is presented. x and y movements were studied with a laser interferometer and the scales were also calibrated using a calibration grid, which was calibrated at MIKES using a laser diffraction method. The advantages and disadvantages of the two methods are discussed. Orthogonalities of the axes were determined by calibration grids and an error separation method. Out-of-plane deviation was measured with a flatness standard. Uncertainty estimates for the coordinate system of the AFM scanner are presented.
Original languageEnglish
Pages (from-to)395-403
JournalMeasurement Science and Technology
Volume18
Issue number2
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

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Atomic Force Microscope
Traceability
Microscopes
Calibration
microscopes
Laser Interferometer
interferometers
Interferometers
grids
Lasers
lasers
Nanometrology
orthogonality
Grid
flatness
scanners
Flatness
Laser modes
Scanner
Orthogonality

Cite this

@article{b148e7299f704c379681f75140269693,
title = "Calibration of a commercial AFM: traceability for a coordinate system",
abstract = "Traceability of measurements and calibration of devices are needed also at the nanometre scale. Calibration of a commercial atomic force microscope (AFM) was studied as part of a dimensional nanometrology project at MIKES. The calibration procedure and results are presented here. The metrological properties of the AFM were characterized by several measurements. A method developed to calibrate the z scale by a laser interferometer during a normal measurement mode of an AFM is presented. x and y movements were studied with a laser interferometer and the scales were also calibrated using a calibration grid, which was calibrated at MIKES using a laser diffraction method. The advantages and disadvantages of the two methods are discussed. Orthogonalities of the axes were determined by calibration grids and an error separation method. Out-of-plane deviation was measured with a flatness standard. Uncertainty estimates for the coordinate system of the AFM scanner are presented.",
author = "V. Korpelainen and A. Lassila",
year = "2007",
doi = "10.1088/0957-0233/18/2/S11",
language = "English",
volume = "18",
pages = "395--403",
journal = "Measurement Science and Technology",
issn = "0957-0233",
publisher = "Institute of Physics IOP",
number = "2",

}

Calibration of a commercial AFM: traceability for a coordinate system. / Korpelainen, V. (Corresponding Author); Lassila, A.

In: Measurement Science and Technology, Vol. 18, No. 2, 2007, p. 395-403.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Calibration of a commercial AFM: traceability for a coordinate system

AU - Korpelainen, V.

AU - Lassila, A.

PY - 2007

Y1 - 2007

N2 - Traceability of measurements and calibration of devices are needed also at the nanometre scale. Calibration of a commercial atomic force microscope (AFM) was studied as part of a dimensional nanometrology project at MIKES. The calibration procedure and results are presented here. The metrological properties of the AFM were characterized by several measurements. A method developed to calibrate the z scale by a laser interferometer during a normal measurement mode of an AFM is presented. x and y movements were studied with a laser interferometer and the scales were also calibrated using a calibration grid, which was calibrated at MIKES using a laser diffraction method. The advantages and disadvantages of the two methods are discussed. Orthogonalities of the axes were determined by calibration grids and an error separation method. Out-of-plane deviation was measured with a flatness standard. Uncertainty estimates for the coordinate system of the AFM scanner are presented.

AB - Traceability of measurements and calibration of devices are needed also at the nanometre scale. Calibration of a commercial atomic force microscope (AFM) was studied as part of a dimensional nanometrology project at MIKES. The calibration procedure and results are presented here. The metrological properties of the AFM were characterized by several measurements. A method developed to calibrate the z scale by a laser interferometer during a normal measurement mode of an AFM is presented. x and y movements were studied with a laser interferometer and the scales were also calibrated using a calibration grid, which was calibrated at MIKES using a laser diffraction method. The advantages and disadvantages of the two methods are discussed. Orthogonalities of the axes were determined by calibration grids and an error separation method. Out-of-plane deviation was measured with a flatness standard. Uncertainty estimates for the coordinate system of the AFM scanner are presented.

U2 - 10.1088/0957-0233/18/2/S11

DO - 10.1088/0957-0233/18/2/S11

M3 - Article

VL - 18

SP - 395

EP - 403

JO - Measurement Science and Technology

JF - Measurement Science and Technology

SN - 0957-0233

IS - 2

ER -