Calibration of a commercial AFM: traceability for a coordinate system

V. Korpelainen (Corresponding Author), A. Lassila

Research output: Contribution to journalArticleScientificpeer-review

39 Citations (Scopus)

Abstract

Traceability of measurements and calibration of devices are needed also at the nanometre scale. Calibration of a commercial atomic force microscope (AFM) was studied as part of a dimensional nanometrology project at MIKES. The calibration procedure and results are presented here. The metrological properties of the AFM were characterized by several measurements. A method developed to calibrate the z scale by a laser interferometer during a normal measurement mode of an AFM is presented. x and y movements were studied with a laser interferometer and the scales were also calibrated using a calibration grid, which was calibrated at MIKES using a laser diffraction method. The advantages and disadvantages of the two methods are discussed. Orthogonalities of the axes were determined by calibration grids and an error separation method. Out-of-plane deviation was measured with a flatness standard. Uncertainty estimates for the coordinate system of the AFM scanner are presented.
Original languageEnglish
Pages (from-to)395-403
JournalMeasurement Science and Technology
Volume18
Issue number2
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

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