Calibration of high aspect ratio quality control optical scanning system

Aneliya Karadzhinova, Timo Hildén, Jouni Heino, Maria Berdova, Rauno Lauhakangas, Francisco Garcia, Eija Tuominen, Ivan Kassamakov

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

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Physics