Cantilever-based photoacoustic sensor for terahertz range

Erkki Ikonen*, Sucheta Sharma, Mohsen Ahmadi, Jussi Rossi, Markku Vainio, Zhipei Sun, Andreas Steiger

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Advantages of photoacoustic detection with a silicon cantilever microphone are demonstrated in the THz range. In our method, earlier membrane microphone is replaced with robust silicon cantilever microphone, which can tolerate high intensity of the input radiation in contrast to vulnerable membrane. The responsivity of the photoacoustic sensor was confirmed to be constant over almost six orders of magnitude of input power, which is not easy to achieve with any other detector of THz radiation. Another favorable feature of the photoacoustic sensor is its uniform spatial responsivity over areas of several millimeters in size. Finally, we measured nearly constant spectral responsivity of the photoacoustic sensor for the wavelength range of 0.3 µm to 200 µm.

    Original languageEnglish
    Title of host publicationTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVI
    EditorsLaurence P. Sadwick, Tianxin Yang
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Electronic)978-1-5106-5945-2
    DOIs
    Publication statusPublished - 2023
    MoE publication typeA4 Article in a conference publication
    EventTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVI 2023 - San Francisco, United States
    Duration: 30 Jan 20231 Feb 2023

    Publication series

    SeriesProceedings of SPIE
    Volume12420
    ISSN0277-786X

    Conference

    ConferenceTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVI 2023
    Country/TerritoryUnited States
    CitySan Francisco
    Period30/01/231/02/23

    Funding

    We thank Gasera Ltd for designing the commercially available instrument parts employed in the experiments. This project is funded by the Academy of Finland Flagship Programme, Photonics Research and Innovation (PREIN), Finland, decision number: 320167. The project is also a part of Universal Electromagnetic Radiation Detector (UNIDET) research project, which is funded by the Academy of Finland, Finland, (Project numbers 314363 and 314364).

    Keywords

    • damage threshold
    • flat spectral responsivity
    • linearity
    • Photoacoustic sensor
    • THz radiation detection

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