Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Pérot Display Pixels

Chengyao Lo, Olli-Heikki Huttunen, Jarno Petäjä, Jukka Hast, Arto Maaninen, Harri Kopola, Hiroyuki Fujita, Hiroshi Toshiyoshi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We demonstrated the possibility of using roll-to-roll mass production techniques like gravure printing, hot embossing, and lamination for MEMS (Micro Electro Mechanical System) Fabry-Pérot display pixel. Integration of printing process was raised and demonstrated. Preliminary structural demonstration of integrated MEMS display pixel made by low cost, high throughput, and easy process printing techniques on flexible substrate was proved.Hot embossing results show good 100 μm-wide electrode isolation on highly amorphous polymer (cellulose acetate, CA) substrate while highly crystalline polymer (polyethyline naphthalate, PEN) shows its stiffness and robustness under high temperature. Structure sizes ranging from 50 to 300 μm with heights ranging from 1 to 15 μm were successfully gravure printed on Al coated PEN substrate with wetting options. Lamination process of 16 μm-thick PEN on 125 μm-thick PEN with gravure printed spacers in between proved easy, simple roll-to-roll process capability for large area display devices.
Original languageEnglish
Title of host publicationProceedings of the 2nd International Student Conference "Printing Future Days 2007"
Pages19-24
ISBN (Electronic)978-3-89700-101-5
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication
EventPrinting Future Days, PFD07: 2nd International Student Conference on Print and Media Technology - Chemnitz, Germany
Duration: 5 Nov 20078 Nov 2007
https://www.digitech.tu-chemnitz.de/pfd/files/pfd07_proceedings_lofi.pdf (Full proceedings)

Conference

ConferencePrinting Future Days, PFD07
Abbreviated titlePFD07
CountryGermany
CityChemnitz
Period5/11/078/11/07
Internet address

Fingerprint

Printing
Pixels
Display devices
Substrates
Polymers
Wetting
Cellulose
Demonstrations
Stiffness
Throughput
Crystalline materials
Electrodes
Costs
Temperature

Cite this

Lo, C., Huttunen, O-H., Petäjä, J., Hast, J., Maaninen, A., Kopola, H., ... Toshiyoshi, H. (2007). Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Pérot Display Pixels. In Proceedings of the 2nd International Student Conference "Printing Future Days 2007" (pp. 19-24)
Lo, Chengyao ; Huttunen, Olli-Heikki ; Petäjä, Jarno ; Hast, Jukka ; Maaninen, Arto ; Kopola, Harri ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi. / Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Pérot Display Pixels. Proceedings of the 2nd International Student Conference "Printing Future Days 2007". 2007. pp. 19-24
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title = "Capability of Realization of Roll-to-Roll Printed MEMS Fabry-P{\'e}rot Display Pixels",
abstract = "We demonstrated the possibility of using roll-to-roll mass production techniques like gravure printing, hot embossing, and lamination for MEMS (Micro Electro Mechanical System) Fabry-P{\'e}rot display pixel. Integration of printing process was raised and demonstrated. Preliminary structural demonstration of integrated MEMS display pixel made by low cost, high throughput, and easy process printing techniques on flexible substrate was proved.Hot embossing results show good 100 μm-wide electrode isolation on highly amorphous polymer (cellulose acetate, CA) substrate while highly crystalline polymer (polyethyline naphthalate, PEN) shows its stiffness and robustness under high temperature. Structure sizes ranging from 50 to 300 μm with heights ranging from 1 to 15 μm were successfully gravure printed on Al coated PEN substrate with wetting options. Lamination process of 16 μm-thick PEN on 125 μm-thick PEN with gravure printed spacers in between proved easy, simple roll-to-roll process capability for large area display devices.",
author = "Chengyao Lo and Olli-Heikki Huttunen and Jarno Pet{\"a}j{\"a} and Jukka Hast and Arto Maaninen and Harri Kopola and Hiroyuki Fujita and Hiroshi Toshiyoshi",
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Lo, C, Huttunen, O-H, Petäjä, J, Hast, J, Maaninen, A, Kopola, H, Fujita, H & Toshiyoshi, H 2007, Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Pérot Display Pixels. in Proceedings of the 2nd International Student Conference "Printing Future Days 2007". pp. 19-24, Printing Future Days, PFD07, Chemnitz, Germany, 5/11/07.

Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Pérot Display Pixels. / Lo, Chengyao; Huttunen, Olli-Heikki; Petäjä, Jarno; Hast, Jukka; Maaninen, Arto; Kopola, Harri; Fujita, Hiroyuki; Toshiyoshi, Hiroshi.

Proceedings of the 2nd International Student Conference "Printing Future Days 2007". 2007. p. 19-24.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Pérot Display Pixels

AU - Lo, Chengyao

AU - Huttunen, Olli-Heikki

AU - Petäjä, Jarno

AU - Hast, Jukka

AU - Maaninen, Arto

AU - Kopola, Harri

AU - Fujita, Hiroyuki

AU - Toshiyoshi, Hiroshi

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N2 - We demonstrated the possibility of using roll-to-roll mass production techniques like gravure printing, hot embossing, and lamination for MEMS (Micro Electro Mechanical System) Fabry-Pérot display pixel. Integration of printing process was raised and demonstrated. Preliminary structural demonstration of integrated MEMS display pixel made by low cost, high throughput, and easy process printing techniques on flexible substrate was proved.Hot embossing results show good 100 μm-wide electrode isolation on highly amorphous polymer (cellulose acetate, CA) substrate while highly crystalline polymer (polyethyline naphthalate, PEN) shows its stiffness and robustness under high temperature. Structure sizes ranging from 50 to 300 μm with heights ranging from 1 to 15 μm were successfully gravure printed on Al coated PEN substrate with wetting options. Lamination process of 16 μm-thick PEN on 125 μm-thick PEN with gravure printed spacers in between proved easy, simple roll-to-roll process capability for large area display devices.

AB - We demonstrated the possibility of using roll-to-roll mass production techniques like gravure printing, hot embossing, and lamination for MEMS (Micro Electro Mechanical System) Fabry-Pérot display pixel. Integration of printing process was raised and demonstrated. Preliminary structural demonstration of integrated MEMS display pixel made by low cost, high throughput, and easy process printing techniques on flexible substrate was proved.Hot embossing results show good 100 μm-wide electrode isolation on highly amorphous polymer (cellulose acetate, CA) substrate while highly crystalline polymer (polyethyline naphthalate, PEN) shows its stiffness and robustness under high temperature. Structure sizes ranging from 50 to 300 μm with heights ranging from 1 to 15 μm were successfully gravure printed on Al coated PEN substrate with wetting options. Lamination process of 16 μm-thick PEN on 125 μm-thick PEN with gravure printed spacers in between proved easy, simple roll-to-roll process capability for large area display devices.

M3 - Conference article in proceedings

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BT - Proceedings of the 2nd International Student Conference "Printing Future Days 2007"

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Lo C, Huttunen O-H, Petäjä J, Hast J, Maaninen A, Kopola H et al. Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Pérot Display Pixels. In Proceedings of the 2nd International Student Conference "Printing Future Days 2007". 2007. p. 19-24