Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Pérot Display Pixels

We demonstrated the possibility of using roll-to-roll mass production techniques like gravure printing, hot embossing, and lamination for MEMS (Micro Electro Mechanical System) Fabry-Pérot display pixel. Integration of printing process was raised and demonstrated. Preliminary structural demonstration of integrated MEMS display pixel made by low cost, high throughput, and easy process printing techniques on flexible substrate was proved.Hot embossing results show good 100 μm-wide electrode isolation on highly amorphous polymer (cellulose acetate, CA) substrate while highly crystalline polymer (polyethyline naphthalate, PEN) shows its stiffness and robustness under high temperature. Structure sizes ranging from 50 to 300 μm with heights ranging from 1 to 15 μm were successfully gravure printed on Al coated PEN substrate with wetting options. Lamination process of 16 μm-thick PEN on 125 μm-thick PEN with gravure printed spacers in between proved easy, simple roll-to-roll process capability for large area display devices.