Capacitive mems power sensor

Tauno Vähä-Heikkilä; Jukka Kyynäräinen; Aarne Oja; Jussi Varis; Heikki Seppä

Capacitive mems power sensor

Tauno Vähä-Heikkilä, Jukka Kyynäräinen, Aarne Oja, Jussi Varis, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Abstract

A novel inline type millimeter wave MEMS power sensor is presented. The electrostatic force due to the rms voltage across the transmission line conductors displace the sensor electrode, and the movement can be detected capacitively. The modelling of the sensor shows that it has S11 better than -30 dB up to 32 GHz with a power resolution of -28 dBm.

Original language	English
Title of host publication	Proceedings of the 3rd Workshop on MEMS for Millimeterwave Communications, MEMSWAVE 2002
Subtitle of host publication	Heraklion, Greece, 26-28 June 2002
Publication status	Published - 2002
MoE publication type	Not Eligible

Cite this

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title = "Capacitive mems power sensor",

abstract = "A novel inline type millimeter wave MEMS power sensor is presented. The electrostatic force due to the rms voltage across the transmission line conductors displace the sensor electrode, and the movement can be detected capacitively. The modelling of the sensor shows that it has S11 better than -30 dB up to 32 GHz with a power resolution of -28 dBm.",

author = "Tauno V{\"a}h{\"a}-Heikkil{\"a} and Jukka Kyyn{\"a}r{\"a}inen and Aarne Oja and Jussi Varis and Heikki Sepp{\"a}",

note = "Project code: T1SU00232 No ISBN/ISSN found for the proceedings",

year = "2002",

language = "English",

booktitle = "Proceedings of the 3rd Workshop on MEMS for Millimeterwave Communications, MEMSWAVE 2002",

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T1 - Capacitive mems power sensor

AU - Vähä-Heikkilä, Tauno

AU - Kyynäräinen, Jukka

AU - Oja, Aarne

AU - Varis, Jussi

AU - Seppä, Heikki

N1 - Project code: T1SU00232 No ISBN/ISSN found for the proceedings

PY - 2002

Y1 - 2002

N2 - A novel inline type millimeter wave MEMS power sensor is presented. The electrostatic force due to the rms voltage across the transmission line conductors displace the sensor electrode, and the movement can be detected capacitively. The modelling of the sensor shows that it has S11 better than -30 dB up to 32 GHz with a power resolution of -28 dBm.

AB - A novel inline type millimeter wave MEMS power sensor is presented. The electrostatic force due to the rms voltage across the transmission line conductors displace the sensor electrode, and the movement can be detected capacitively. The modelling of the sensor shows that it has S11 better than -30 dB up to 32 GHz with a power resolution of -28 dBm.

M3 - Conference article in proceedings

BT - Proceedings of the 3rd Workshop on MEMS for Millimeterwave Communications, MEMSWAVE 2002

ER -

Capacitive mems power sensor

Abstract

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