Capacitive mems power sensor

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Abstract

A novel inline type millimeter wave MEMS power sensor is presented. The electrostatic force due to the rms voltage across the transmission line conductors displace the sensor electrode, and the movement can be detected capacitively. The modelling of the sensor shows that it has S11 better than -30 dB up to 32 GHz with a power resolution of -28 dBm.
Original languageEnglish
Title of host publicationProceedings of the 3rd Workshop on MEMS for Millimeterwave Communications, MEMSWAVE 2002
Subtitle of host publicationHeraklion, Greece, 26-28 June 2002
Publication statusPublished - 2002
MoE publication typeNot Eligible

Fingerprint Dive into the research topics of 'Capacitive mems power sensor'. Together they form a unique fingerprint.

  • Cite this

    Vähä-Heikkilä, T., Kyynäräinen, J., Oja, A., Varis, J., & Seppä, H. (2002). Capacitive mems power sensor. In Proceedings of the 3rd Workshop on MEMS for Millimeterwave Communications, MEMSWAVE 2002: Heraklion, Greece, 26-28 June 2002