A novel inline type millimeter wave MEMS power sensor is presented. The electrostatic force due to the rms voltage across the transmission line conductors displace the sensor electrode, and the movement can be detected capacitively. The modelling of the sensor shows that it has S11 better than -30 dB up to 32 GHz with a power resolution of -28 dBm.
|Title of host publication||Proceedings of the 3rd Workshop on MEMS for Millimeterwave Communications, MEMSWAVE 2002|
|Subtitle of host publication||Heraklion, Greece, 26-28 June 2002|
|Publication status||Published - 2002|
|MoE publication type||Not Eligible|