Capacitive mems power sensor

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific


    A novel inline type millimeter wave MEMS power sensor is presented. The electrostatic force due to the rms voltage across the transmission line conductors displace the sensor electrode, and the movement can be detected capacitively. The modelling of the sensor shows that it has S11 better than -30 dB up to 32 GHz with a power resolution of -28 dBm.
    Original languageEnglish
    Title of host publicationProceedings of the 3rd Workshop on MEMS for Millimeterwave Communications, MEMSWAVE 2002
    Subtitle of host publicationHeraklion, Greece, 26-28 June 2002
    Publication statusPublished - 2002
    MoE publication typeNot Eligible


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