Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

Altti Torkkeli, Hannu Sipola, Heikki Seppä, Jaakko Saarilahti, Outi Rusanen, Jarmo Hietanen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings of the 13th European Conference on Solid-State Transducers, EUROSENSORS XIII
    PublisherDelft Technical University
    Number of pages4
    ISBN (Electronic)978-90-76699-02-8
    Publication statusPublished - 1999
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event13th European Conference on Solid-State, EUROSENSORS XIII - Hague, Netherlands
    Duration: 12 Sept 199915 Sept 1999


    Conference13th European Conference on Solid-State, EUROSENSORS XIII

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