@inproceedings{d90e3bd045694c9788bf9182aadb0a24,
title = "Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate",
author = "Altti Torkkeli and Hannu Sipola and Heikki Sepp{\"a} and Jaakko Saarilahti and Outi Rusanen and Jarmo Hietanen",
year = "1999",
language = "English",
booktitle = "Proceedings of the 13th European Conference on Solid-State Transducers, EUROSENSORS XIII",
publisher = "Delft Technical University",
address = "Netherlands",
note = "13th European Conference on Solid-State, EUROSENSORS XIII ; Conference date: 12-09-1999 Through 15-09-1999",
}