Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

Altti Torkkeli, Hannu Sipola, Heikki Seppä, Jaakko Saarilahti, Outi Rusanen, Jarmo Hietanen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of the 13th European Conference on Solid-State Transducers, EUROSENSORS XIII
Publisher	Delft University of Technology
Number of pages	4
ISBN (Electronic)	978-90-76699-02-8
Publication status	Published - 1999
MoE publication type	B3 Non-refereed article in conference proceedings
Event	13th European Conference on Solid-State, EUROSENSORS XIII - Hague, Netherlands Duration: 12 Sep 1999 → 15 Sep 1999

Conference	13th European Conference on Solid-State, EUROSENSORS XIII
Country	Netherlands
City	Hague
Period	12/09/99 → 15/09/99

Cite this

@inproceedings{d90e3bd045694c9788bf9182aadb0a24,

title = "Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate",

author = "Altti Torkkeli and Hannu Sipola and Heikki Sepp{\"a} and Jaakko Saarilahti and Outi Rusanen and Jarmo Hietanen",

year = "1999",

language = "English",

booktitle = "Proceedings of the 13th European Conference on Solid-State Transducers, EUROSENSORS XIII",

publisher = "Delft University of Technology",

address = "Netherlands",

note = "13th European Conference on Solid-State, EUROSENSORS XIII ; Conference date: 12-09-1999 Through 15-09-1999",

}

Torkkeli, A, Sipola, H , Seppä, H , Saarilahti, J, Rusanen, O & Hietanen, J 1999, Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate. in Proceedings of the 13th European Conference on Solid-State Transducers, EUROSENSORS XIII. Delft University of Technology, 13th European Conference on Solid-State, EUROSENSORS XIII, Hague, Netherlands, 12/09/99.

Proceedings of the 13th European Conference on Solid-State Transducers, EUROSENSORS XIII. Delft University of Technology, 1999.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

AU - Torkkeli, Altti

AU - Sipola, Hannu

AU - Seppä, Heikki

AU - Saarilahti, Jaakko

AU - Rusanen, Outi

AU - Hietanen, Jarmo

PY - 1999

Y1 - 1999

M3 - Conference article in proceedings

BT - Proceedings of the 13th European Conference on Solid-State Transducers, EUROSENSORS XIII

PB - Delft University of Technology

T2 - 13th European Conference on Solid-State, EUROSENSORS XIII

Y2 - 12 September 1999 through 15 September 1999

ER -