Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

Altti Torkkeli, Hannu Sipola, Heikki Seppä, Jaakko Saarilahti, Outi Rusanen, Jarmo Hietanen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the 13th European Conference on Solid-State Transducers, EUROSENSORS XIII
PublisherDelft Technical University
Number of pages4
ISBN (Electronic)978-90-76699-02-8
Publication statusPublished - 1999
MoE publication typeB3 Non-refereed article in conference proceedings
Event13th European Conference on Solid-State, EUROSENSORS XIII - Hague, Netherlands
Duration: 12 Sep 199915 Sep 1999


Conference13th European Conference on Solid-State, EUROSENSORS XIII

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