Capacitive RF MEMS power sensors

Tauno Vähä-Heikkilä, Jukka Kyynäräinen, James Dekker, Panu Pekko, Nadine Guillaume, Aarne Oja, Jussi Varis, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    Physics & Astronomy