Capacitive Silicon Microphone

Altti Torkkeli, Jaakko Saarilahti, Heikki Seppä, Hannu Sipola, Outi Rusanen, Jarmo Hietanen

    Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

    2 Citations (Scopus)

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    Mathematics

    Physics & Astronomy